JPS54107268A - Integrated circuit unit and its production - Google Patents
Integrated circuit unit and its productionInfo
- Publication number
- JPS54107268A JPS54107268A JP1355178A JP1355178A JPS54107268A JP S54107268 A JPS54107268 A JP S54107268A JP 1355178 A JP1355178 A JP 1355178A JP 1355178 A JP1355178 A JP 1355178A JP S54107268 A JPS54107268 A JP S54107268A
- Authority
- JP
- Japan
- Prior art keywords
- channel stopper
- production
- integrated circuit
- circuit unit
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To remove a bridge part to improve the integration rate of a transistor by preventing a leakage current.
CONSTITUTION: Source region 13, drain region 14 and insulating film 16 are formed on p-type semiconductor substance 12, and active region a is masked with a resistor, and field channel stopper layer 15 is formed by ion injection. Next, active region a is etched to form the second insulating film, and after that, when gate-off channel stopper 19 which overlaps field channel stopper 15 including gate electrodes 8' and 8'' is formed, this stopper 19 is formed in self-alignment for gate electrode 18 to prevent completely the leakage current.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1355178A JPS54107268A (en) | 1978-02-10 | 1978-02-10 | Integrated circuit unit and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1355178A JPS54107268A (en) | 1978-02-10 | 1978-02-10 | Integrated circuit unit and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54107268A true JPS54107268A (en) | 1979-08-22 |
Family
ID=11836293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1355178A Pending JPS54107268A (en) | 1978-02-10 | 1978-02-10 | Integrated circuit unit and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54107268A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4991783A (en) * | 1973-01-09 | 1974-09-02 |
-
1978
- 1978-02-10 JP JP1355178A patent/JPS54107268A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4991783A (en) * | 1973-01-09 | 1974-09-02 |
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