JPS54106174A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS54106174A
JPS54106174A JP1384478A JP1384478A JPS54106174A JP S54106174 A JPS54106174 A JP S54106174A JP 1384478 A JP1384478 A JP 1384478A JP 1384478 A JP1384478 A JP 1384478A JP S54106174 A JPS54106174 A JP S54106174A
Authority
JP
Japan
Prior art keywords
film
layer
type
coated
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1384478A
Other languages
English (en)
Inventor
Masatake Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1384478A priority Critical patent/JPS54106174A/ja
Publication of JPS54106174A publication Critical patent/JPS54106174A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP1384478A 1978-02-08 1978-02-08 Semiconductor device and its manufacture Pending JPS54106174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1384478A JPS54106174A (en) 1978-02-08 1978-02-08 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1384478A JPS54106174A (en) 1978-02-08 1978-02-08 Semiconductor device and its manufacture

Publications (1)

Publication Number Publication Date
JPS54106174A true JPS54106174A (en) 1979-08-20

Family

ID=11844575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1384478A Pending JPS54106174A (en) 1978-02-08 1978-02-08 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS54106174A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527645A (en) * 1978-08-17 1980-02-27 Nec Corp Semiconductor device
JPS6052633U (ja) * 1983-09-14 1985-04-13 関西日本電気株式会社 ダイオ−ド
JPS60136270A (ja) * 1983-12-24 1985-07-19 Toshiba Corp 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010565A (ja) * 1973-05-24 1975-02-03
JPS5237766A (en) * 1975-09-19 1977-03-23 Nec Corp Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010565A (ja) * 1973-05-24 1975-02-03
JPS5237766A (en) * 1975-09-19 1977-03-23 Nec Corp Semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527645A (en) * 1978-08-17 1980-02-27 Nec Corp Semiconductor device
JPS6227547B2 (ja) * 1978-08-17 1987-06-15 Nippon Electric Co
JPS6052633U (ja) * 1983-09-14 1985-04-13 関西日本電気株式会社 ダイオ−ド
JPS60136270A (ja) * 1983-12-24 1985-07-19 Toshiba Corp 半導体装置の製造方法

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