JPS54105982A - Mis-type semiconductor device and its manufacture - Google Patents
Mis-type semiconductor device and its manufactureInfo
- Publication number
- JPS54105982A JPS54105982A JP1274978A JP1274978A JPS54105982A JP S54105982 A JPS54105982 A JP S54105982A JP 1274978 A JP1274978 A JP 1274978A JP 1274978 A JP1274978 A JP 1274978A JP S54105982 A JPS54105982 A JP S54105982A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- coated
- conducting
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000011521 glass Substances 0.000 abstract 4
- 239000012212 insulator Substances 0.000 abstract 4
- 239000013078 crystal Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 238000003475 lamination Methods 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 230000004927 fusion Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 239000007858 starting material Substances 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1274978A JPS54105982A (en) | 1978-02-07 | 1978-02-07 | Mis-type semiconductor device and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1274978A JPS54105982A (en) | 1978-02-07 | 1978-02-07 | Mis-type semiconductor device and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54105982A true JPS54105982A (en) | 1979-08-20 |
| JPS627708B2 JPS627708B2 (enrdf_load_stackoverflow) | 1987-02-18 |
Family
ID=11814057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1274978A Granted JPS54105982A (en) | 1978-02-07 | 1978-02-07 | Mis-type semiconductor device and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54105982A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134771A (en) * | 1980-03-26 | 1981-10-21 | Nec Corp | Insulation gate type field effect transistor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52132776A (en) * | 1976-04-30 | 1977-11-07 | Fujitsu Ltd | Manufacture for semiconductor unit |
-
1978
- 1978-02-07 JP JP1274978A patent/JPS54105982A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52132776A (en) * | 1976-04-30 | 1977-11-07 | Fujitsu Ltd | Manufacture for semiconductor unit |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134771A (en) * | 1980-03-26 | 1981-10-21 | Nec Corp | Insulation gate type field effect transistor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627708B2 (enrdf_load_stackoverflow) | 1987-02-18 |
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