JPS54105466A - Liquid-phase eptaxial growth unit - Google Patents

Liquid-phase eptaxial growth unit

Info

Publication number
JPS54105466A
JPS54105466A JP1200578A JP1200578A JPS54105466A JP S54105466 A JPS54105466 A JP S54105466A JP 1200578 A JP1200578 A JP 1200578A JP 1200578 A JP1200578 A JP 1200578A JP S54105466 A JPS54105466 A JP S54105466A
Authority
JP
Japan
Prior art keywords
main body
holder
liquid
boat
epitaxial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1200578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240846B2 (enrdf_load_stackoverflow
Inventor
Tetsuo Sekiwa
Makoto Naito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1200578A priority Critical patent/JPS54105466A/ja
Publication of JPS54105466A publication Critical patent/JPS54105466A/ja
Publication of JPS6240846B2 publication Critical patent/JPS6240846B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
JP1200578A 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit Granted JPS54105466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200578A JPS54105466A (en) 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200578A JPS54105466A (en) 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit

Publications (2)

Publication Number Publication Date
JPS54105466A true JPS54105466A (en) 1979-08-18
JPS6240846B2 JPS6240846B2 (enrdf_load_stackoverflow) 1987-08-31

Family

ID=11793459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1200578A Granted JPS54105466A (en) 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit

Country Status (1)

Country Link
JP (1) JPS54105466A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6240846B2 (enrdf_load_stackoverflow) 1987-08-31

Similar Documents

Publication Publication Date Title
JPS54105466A (en) Liquid-phase eptaxial growth unit
JPS645999A (en) Production of thin film of ferroelectric single crystal
JPS55163835A (en) Selective liquid phase growth of on semiconductor region
JPS5556625A (en) Semiconductor crystal growing device
JPS5742598A (en) Liquid-phase epitaxial growing method
JPS5732620A (en) Method for liquid-phase epitaxial growth and growing boat
JPS5919920B2 (ja) 液相エピタキシヤル成長装置
JPS5211860A (en) Liquid phase epitaxial device
JPS5538039A (en) Device for liquid-phase growth of semiconductor
JPS54153786A (en) Single crystal growing method
JPS52115783A (en) Liquid phase epitaxial growth
JPS5669821A (en) Manufacture of semiconducting crystal
JPS5464461A (en) Liquid phase epitaxial growth method
JPS535966A (en) Device for effecting liquid-phase epitaxial growth
JPS56131927A (en) Method and device for liquid phase epitaquitial crystal growth
JPS5710922A (en) Sliding type liquid phase epitaxial growth device
JPS5777095A (en) Liquid phase epitaxial growing apparatus
JPS57106599A (en) Liquid phase growth device
JPS52146553A (en) Carbon boat for liquid phase epitaxial growth
JPS54146280A (en) Epitaxial-growth apparatus in liquid phase
JPS57103313A (en) Method for liquid phase epitaxial growth
JPS53125276A (en) Liquid phase epitaxial growth apparatus
JPS5769732A (en) Liquid phase epitaxially growing device
JPS56114316A (en) Boat for liquid phase epitaxial growth
JPS5590499A (en) Liquid phase epitaxial growing