JPS6240846B2 - - Google Patents

Info

Publication number
JPS6240846B2
JPS6240846B2 JP1200578A JP1200578A JPS6240846B2 JP S6240846 B2 JPS6240846 B2 JP S6240846B2 JP 1200578 A JP1200578 A JP 1200578A JP 1200578 A JP1200578 A JP 1200578A JP S6240846 B2 JPS6240846 B2 JP S6240846B2
Authority
JP
Japan
Prior art keywords
solution
boat body
epitaxial growth
holder
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1200578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54105466A (en
Inventor
Tetsuo Sekiwa
Makoto Naito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP1200578A priority Critical patent/JPS54105466A/ja
Publication of JPS54105466A publication Critical patent/JPS54105466A/ja
Publication of JPS6240846B2 publication Critical patent/JPS6240846B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1200578A 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit Granted JPS54105466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200578A JPS54105466A (en) 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200578A JPS54105466A (en) 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit

Publications (2)

Publication Number Publication Date
JPS54105466A JPS54105466A (en) 1979-08-18
JPS6240846B2 true JPS6240846B2 (enrdf_load_stackoverflow) 1987-08-31

Family

ID=11793459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1200578A Granted JPS54105466A (en) 1978-02-07 1978-02-07 Liquid-phase eptaxial growth unit

Country Status (1)

Country Link
JP (1) JPS54105466A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS54105466A (en) 1979-08-18

Similar Documents

Publication Publication Date Title
US3759759A (en) Push pull method for solution epitaxial growth of iii v compounds
US3648653A (en) Liquid phase crystal growth apparatus
JPH0217519B2 (enrdf_load_stackoverflow)
JPS6240846B2 (enrdf_load_stackoverflow)
US3809010A (en) Apparatus for growing of epitaxial layers
US4393806A (en) Boat for the epitaxial growth from the liquid phase
GB2036590A (en) Process and apparatus for the production of ga a1 as:si epitaxial coatings
JPS58120600A (ja) ３―ｖ族化合物半導体のエピタキシカル成長方法
US4390379A (en) Elimination of edge growth in liquid phase epitaxy
JPH0243723A (ja) 溶液成長装置
JP2730235B2 (ja) 液相エピタキシヤル成長用るつぼ
JPS6235998B2 (enrdf_load_stackoverflow)
JP3515858B2 (ja) 液相エピタキシャル成長用ボート
JP3073870B2 (ja) 半導体液相エピタキシャル装置
JPS5935589Y2 (ja) 液相式結晶成長装置
JPS5926998A (ja) 液相エピタキシヤル成長方法
JPH02221187A (ja) 液相エピタキシャル成長方法
US4412502A (en) Apparatus for the elimination of edge growth in liquid phase epitaxy
JPS59213699A (ja) 液相エピタキシヤル成長方法
JPH05114565A (ja) スライドボート部材およびこの部材を用いた液相エピタキシヤル成長法
JPS59128297A (ja) 液相エピタキシヤル成長法
JPH02192487A (ja) 液相エピタキシャル成長方法
JPS6273625A (ja) 液相エピタキシヤル成長装置
JPH043101B2 (enrdf_load_stackoverflow)
JPS62292693A (ja) 液相エピタキシャル成長方法