JPS54100667A - Formation method of resist pattern - Google Patents

Formation method of resist pattern

Info

Publication number
JPS54100667A
JPS54100667A JP691978A JP691978A JPS54100667A JP S54100667 A JPS54100667 A JP S54100667A JP 691978 A JP691978 A JP 691978A JP 691978 A JP691978 A JP 691978A JP S54100667 A JPS54100667 A JP S54100667A
Authority
JP
Japan
Prior art keywords
copper
resist pattern
copper foil
chemicals
resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP691978A
Other languages
English (en)
Inventor
Mitsuo Yamashita
Kiyotaka Miyagawa
Kenji Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP691978A priority Critical patent/JPS54100667A/ja
Publication of JPS54100667A publication Critical patent/JPS54100667A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
JP691978A 1978-01-25 1978-01-25 Formation method of resist pattern Pending JPS54100667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP691978A JPS54100667A (en) 1978-01-25 1978-01-25 Formation method of resist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP691978A JPS54100667A (en) 1978-01-25 1978-01-25 Formation method of resist pattern

Publications (1)

Publication Number Publication Date
JPS54100667A true JPS54100667A (en) 1979-08-08

Family

ID=11651634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP691978A Pending JPS54100667A (en) 1978-01-25 1978-01-25 Formation method of resist pattern

Country Status (1)

Country Link
JP (1) JPS54100667A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6352499A (ja) * 1986-08-22 1988-03-05 株式会社日立製作所 印刷回路板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6352499A (ja) * 1986-08-22 1988-03-05 株式会社日立製作所 印刷回路板の製造方法

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