JPS53110376A - Resist coating method - Google Patents
Resist coating methodInfo
- Publication number
- JPS53110376A JPS53110376A JP2476377A JP2476377A JPS53110376A JP S53110376 A JPS53110376 A JP S53110376A JP 2476377 A JP2476377 A JP 2476377A JP 2476377 A JP2476377 A JP 2476377A JP S53110376 A JPS53110376 A JP S53110376A
- Authority
- JP
- Japan
- Prior art keywords
- coating method
- resist
- resist coating
- substrate
- securing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To prevent occurrence of the uneven film thickness to secure a uniform resist film, by securing a resist solvent atmosphere at the periphery of the substrate when a rotary coating of the photo resist is given to the substrate and changing the partial pressure of the solvent vapor during coating.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2476377A JPS53110376A (en) | 1977-03-09 | 1977-03-09 | Resist coating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2476377A JPS53110376A (en) | 1977-03-09 | 1977-03-09 | Resist coating method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53110376A true JPS53110376A (en) | 1978-09-27 |
Family
ID=12147179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2476377A Pending JPS53110376A (en) | 1977-03-09 | 1977-03-09 | Resist coating method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53110376A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61285716A (en) * | 1985-06-12 | 1986-12-16 | Hitachi Ltd | Resist coating method |
-
1977
- 1977-03-09 JP JP2476377A patent/JPS53110376A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61285716A (en) * | 1985-06-12 | 1986-12-16 | Hitachi Ltd | Resist coating method |
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