JPS53110376A - Resist coating method - Google Patents

Resist coating method

Info

Publication number
JPS53110376A
JPS53110376A JP2476377A JP2476377A JPS53110376A JP S53110376 A JPS53110376 A JP S53110376A JP 2476377 A JP2476377 A JP 2476377A JP 2476377 A JP2476377 A JP 2476377A JP S53110376 A JPS53110376 A JP S53110376A
Authority
JP
Japan
Prior art keywords
coating method
resist
resist coating
substrate
securing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2476377A
Other languages
Japanese (ja)
Inventor
Toshio Nakano
Akira Sasano
Haruo Matsumaru
Ken Tsutsui
Eiichi Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Denshi KK
Hitachi Ltd
Original Assignee
Hitachi Denshi KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Denshi KK, Hitachi Ltd filed Critical Hitachi Denshi KK
Priority to JP2476377A priority Critical patent/JPS53110376A/en
Publication of JPS53110376A publication Critical patent/JPS53110376A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevent occurrence of the uneven film thickness to secure a uniform resist film, by securing a resist solvent atmosphere at the periphery of the substrate when a rotary coating of the photo resist is given to the substrate and changing the partial pressure of the solvent vapor during coating.
COPYRIGHT: (C)1978,JPO&Japio
JP2476377A 1977-03-09 1977-03-09 Resist coating method Pending JPS53110376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2476377A JPS53110376A (en) 1977-03-09 1977-03-09 Resist coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2476377A JPS53110376A (en) 1977-03-09 1977-03-09 Resist coating method

Publications (1)

Publication Number Publication Date
JPS53110376A true JPS53110376A (en) 1978-09-27

Family

ID=12147179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2476377A Pending JPS53110376A (en) 1977-03-09 1977-03-09 Resist coating method

Country Status (1)

Country Link
JP (1) JPS53110376A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61285716A (en) * 1985-06-12 1986-12-16 Hitachi Ltd Resist coating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61285716A (en) * 1985-06-12 1986-12-16 Hitachi Ltd Resist coating method

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