JPS5391581A - Vapor cooling type semiconductor device - Google Patents

Vapor cooling type semiconductor device

Info

Publication number
JPS5391581A
JPS5391581A JP625477A JP625477A JPS5391581A JP S5391581 A JPS5391581 A JP S5391581A JP 625477 A JP625477 A JP 625477A JP 625477 A JP625477 A JP 625477A JP S5391581 A JPS5391581 A JP S5391581A
Authority
JP
Japan
Prior art keywords
semiconductor device
type semiconductor
cooling type
vapor cooling
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP625477A
Other languages
Japanese (ja)
Inventor
Kiyohiko Mihara
Hiroshi Mitsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP625477A priority Critical patent/JPS5391581A/en
Publication of JPS5391581A publication Critical patent/JPS5391581A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE: To prevent the corrosion due to the thermally-decomposed chemical refrigerant and the deterioration of characteristics by covering the electrode surface of a semiconductor element with an Au layer.
COPYRIGHT: (C)1978,JPO&Japio
JP625477A 1977-01-21 1977-01-21 Vapor cooling type semiconductor device Pending JPS5391581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP625477A JPS5391581A (en) 1977-01-21 1977-01-21 Vapor cooling type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP625477A JPS5391581A (en) 1977-01-21 1977-01-21 Vapor cooling type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5391581A true JPS5391581A (en) 1978-08-11

Family

ID=11633340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP625477A Pending JPS5391581A (en) 1977-01-21 1977-01-21 Vapor cooling type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5391581A (en)

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