JPS5389381A - Production of integrated circuit - Google Patents

Production of integrated circuit

Info

Publication number
JPS5389381A
JPS5389381A JP288977A JP288977A JPS5389381A JP S5389381 A JPS5389381 A JP S5389381A JP 288977 A JP288977 A JP 288977A JP 288977 A JP288977 A JP 288977A JP S5389381 A JPS5389381 A JP S5389381A
Authority
JP
Japan
Prior art keywords
layer
impurity concentration
production
integrated circuit
high impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP288977A
Other languages
Japanese (ja)
Inventor
Hideo Sunami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP288977A priority Critical patent/JPS5389381A/en
Publication of JPS5389381A publication Critical patent/JPS5389381A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain minute and flat contacts by selectively depositing a Si layer of a low impurity concentration on a Si layer of a high impurity concentration, and leaving thick SiO2 films on the high impurity concentration layer through low temperature wet oxidation by a self-alignment method.
COPYRIGHT: (C)1978,JPO&Japio
JP288977A 1977-01-17 1977-01-17 Production of integrated circuit Pending JPS5389381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP288977A JPS5389381A (en) 1977-01-17 1977-01-17 Production of integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP288977A JPS5389381A (en) 1977-01-17 1977-01-17 Production of integrated circuit

Publications (1)

Publication Number Publication Date
JPS5389381A true JPS5389381A (en) 1978-08-05

Family

ID=11541913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP288977A Pending JPS5389381A (en) 1977-01-17 1977-01-17 Production of integrated circuit

Country Status (1)

Country Link
JP (1) JPS5389381A (en)

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