JPS5384484A - Mos-type semiconductor device and its manufacture process - Google Patents

Mos-type semiconductor device and its manufacture process

Info

Publication number
JPS5384484A
JPS5384484A JP15950576A JP15950576A JPS5384484A JP S5384484 A JPS5384484 A JP S5384484A JP 15950576 A JP15950576 A JP 15950576A JP 15950576 A JP15950576 A JP 15950576A JP S5384484 A JPS5384484 A JP S5384484A
Authority
JP
Japan
Prior art keywords
mos
semiconductor device
type semiconductor
manufacture process
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15950576A
Other languages
Japanese (ja)
Other versions
JPS605075B2 (en
Inventor
Onori Ishikawa
Takeya Ezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15950576A priority Critical patent/JPS605075B2/en
Publication of JPS5384484A publication Critical patent/JPS5384484A/en
Publication of JPS605075B2 publication Critical patent/JPS605075B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the capacity between the substrate and the source with increased operation velocity as well as to decrease the power consumption, by forming the source region so deep that it reaches the inside of the substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15950576A 1976-12-29 1976-12-29 MOS type semiconductor device and its manufacturing method Expired JPS605075B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15950576A JPS605075B2 (en) 1976-12-29 1976-12-29 MOS type semiconductor device and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15950576A JPS605075B2 (en) 1976-12-29 1976-12-29 MOS type semiconductor device and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS5384484A true JPS5384484A (en) 1978-07-25
JPS605075B2 JPS605075B2 (en) 1985-02-08

Family

ID=15695225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15950576A Expired JPS605075B2 (en) 1976-12-29 1976-12-29 MOS type semiconductor device and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS605075B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583270A (en) * 1978-12-15 1980-06-23 Raytheon Co Method of fabricating semiconductor device
JPH0344076A (en) * 1989-07-12 1991-02-25 Oki Electric Ind Co Ltd Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583270A (en) * 1978-12-15 1980-06-23 Raytheon Co Method of fabricating semiconductor device
JPS6326553B2 (en) * 1978-12-15 1988-05-30 Raytheon Co
JPH0344076A (en) * 1989-07-12 1991-02-25 Oki Electric Ind Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS605075B2 (en) 1985-02-08

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