JPS5384484A - Mos-type semiconductor device and its manufacture process - Google Patents
Mos-type semiconductor device and its manufacture processInfo
- Publication number
- JPS5384484A JPS5384484A JP15950576A JP15950576A JPS5384484A JP S5384484 A JPS5384484 A JP S5384484A JP 15950576 A JP15950576 A JP 15950576A JP 15950576 A JP15950576 A JP 15950576A JP S5384484 A JPS5384484 A JP S5384484A
- Authority
- JP
- Japan
- Prior art keywords
- mos
- semiconductor device
- type semiconductor
- manufacture process
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To reduce the capacity between the substrate and the source with increased operation velocity as well as to decrease the power consumption, by forming the source region so deep that it reaches the inside of the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15950576A JPS605075B2 (en) | 1976-12-29 | 1976-12-29 | MOS type semiconductor device and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15950576A JPS605075B2 (en) | 1976-12-29 | 1976-12-29 | MOS type semiconductor device and its manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5384484A true JPS5384484A (en) | 1978-07-25 |
JPS605075B2 JPS605075B2 (en) | 1985-02-08 |
Family
ID=15695225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15950576A Expired JPS605075B2 (en) | 1976-12-29 | 1976-12-29 | MOS type semiconductor device and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS605075B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583270A (en) * | 1978-12-15 | 1980-06-23 | Raytheon Co | Method of fabricating semiconductor device |
JPH0344076A (en) * | 1989-07-12 | 1991-02-25 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1976
- 1976-12-29 JP JP15950576A patent/JPS605075B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583270A (en) * | 1978-12-15 | 1980-06-23 | Raytheon Co | Method of fabricating semiconductor device |
JPS6326553B2 (en) * | 1978-12-15 | 1988-05-30 | Raytheon Co | |
JPH0344076A (en) * | 1989-07-12 | 1991-02-25 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS605075B2 (en) | 1985-02-08 |
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