JPS5383583A - Semiconductor device and its manufacture - Google Patents
Semiconductor device and its manufactureInfo
- Publication number
- JPS5383583A JPS5383583A JP16073276A JP16073276A JPS5383583A JP S5383583 A JPS5383583 A JP S5383583A JP 16073276 A JP16073276 A JP 16073276A JP 16073276 A JP16073276 A JP 16073276A JP S5383583 A JPS5383583 A JP S5383583A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- region
- source
- drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To facilitate an easy control for both the concentration and the length as well as to enhance the dielectric strength between the source and the drain, by forming a region to be the enhancement channel part later only near the surface of the semiconductor substrate with shallower depth the source region.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51160732A JPS5826670B2 (en) | 1976-12-28 | 1976-12-28 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51160732A JPS5826670B2 (en) | 1976-12-28 | 1976-12-28 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5383583A true JPS5383583A (en) | 1978-07-24 |
JPS5826670B2 JPS5826670B2 (en) | 1983-06-04 |
Family
ID=15721252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51160732A Expired JPS5826670B2 (en) | 1976-12-28 | 1976-12-28 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5826670B2 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48100078A (en) * | 1972-03-29 | 1973-12-18 | ||
JPS50123273A (en) * | 1974-03-16 | 1975-09-27 |
-
1976
- 1976-12-28 JP JP51160732A patent/JPS5826670B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48100078A (en) * | 1972-03-29 | 1973-12-18 | ||
JPS50123273A (en) * | 1974-03-16 | 1975-09-27 |
Also Published As
Publication number | Publication date |
---|---|
JPS5826670B2 (en) | 1983-06-04 |
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