JPS5382162A - Beam epitaxial growth method - Google Patents
Beam epitaxial growth methodInfo
- Publication number
- JPS5382162A JPS5382162A JP15869376A JP15869376A JPS5382162A JP S5382162 A JPS5382162 A JP S5382162A JP 15869376 A JP15869376 A JP 15869376A JP 15869376 A JP15869376 A JP 15869376A JP S5382162 A JPS5382162 A JP S5382162A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- growth method
- beam epitaxial
- growing
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE:To perform the selective growing of complicated patterns, by limiting the progressing domain of growing through the provision of the mask having open hole around the surface of substrate and by growing as required sequentially through the movement of mask.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15869376A JPS5382162A (en) | 1976-12-27 | 1976-12-27 | Beam epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15869376A JPS5382162A (en) | 1976-12-27 | 1976-12-27 | Beam epitaxial growth method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5382162A true JPS5382162A (en) | 1978-07-20 |
Family
ID=15677283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15869376A Pending JPS5382162A (en) | 1976-12-27 | 1976-12-27 | Beam epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5382162A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS577925A (en) * | 1980-06-18 | 1982-01-16 | Matsushita Electric Ind Co Ltd | Manufacture of thin film integrated circuit |
JPH02214184A (en) * | 1989-02-15 | 1990-08-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
-
1976
- 1976-12-27 JP JP15869376A patent/JPS5382162A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS577925A (en) * | 1980-06-18 | 1982-01-16 | Matsushita Electric Ind Co Ltd | Manufacture of thin film integrated circuit |
JPH02214184A (en) * | 1989-02-15 | 1990-08-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
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