JPS5377170A - Selective growth method of compound semiconductor - Google Patents

Selective growth method of compound semiconductor

Info

Publication number
JPS5377170A
JPS5377170A JP15319276A JP15319276A JPS5377170A JP S5377170 A JPS5377170 A JP S5377170A JP 15319276 A JP15319276 A JP 15319276A JP 15319276 A JP15319276 A JP 15319276A JP S5377170 A JPS5377170 A JP S5377170A
Authority
JP
Japan
Prior art keywords
selective growth
compound semiconductor
growth method
dividing
sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15319276A
Other languages
Japanese (ja)
Inventor
Toshio Fujii
Sukehisa Hiyamizu
Seihei Maekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15319276A priority Critical patent/JPS5377170A/en
Publication of JPS5377170A publication Critical patent/JPS5377170A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To perform selective growth by dividing sources by every element and shielding molecular beams by a wire.
COPYRIGHT: (C)1978,JPO&Japio
JP15319276A 1976-12-20 1976-12-20 Selective growth method of compound semiconductor Pending JPS5377170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15319276A JPS5377170A (en) 1976-12-20 1976-12-20 Selective growth method of compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15319276A JPS5377170A (en) 1976-12-20 1976-12-20 Selective growth method of compound semiconductor

Publications (1)

Publication Number Publication Date
JPS5377170A true JPS5377170A (en) 1978-07-08

Family

ID=15557048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15319276A Pending JPS5377170A (en) 1976-12-20 1976-12-20 Selective growth method of compound semiconductor

Country Status (1)

Country Link
JP (1) JPS5377170A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145837U (en) * 1980-03-31 1981-11-04
JPS5931019A (en) * 1982-08-14 1984-02-18 Ulvac Corp Manufacture of ic by mbe method and apparatus for manufacturing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145837U (en) * 1980-03-31 1981-11-04
JPS5931019A (en) * 1982-08-14 1984-02-18 Ulvac Corp Manufacture of ic by mbe method and apparatus for manufacturing the same
JPH0415611B2 (en) * 1982-08-14 1992-03-18 Ulvac Corp

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