JPS5380964A - Forming process of substrate for integrated circuit - Google Patents

Forming process of substrate for integrated circuit

Info

Publication number
JPS5380964A
JPS5380964A JP15644476A JP15644476A JPS5380964A JP S5380964 A JPS5380964 A JP S5380964A JP 15644476 A JP15644476 A JP 15644476A JP 15644476 A JP15644476 A JP 15644476A JP S5380964 A JPS5380964 A JP S5380964A
Authority
JP
Japan
Prior art keywords
substrate
integrated circuit
forming process
performance
highresistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15644476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS552732B2 (enrdf_load_html_response
Inventor
Michiyuki Harada
Masayasu Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP15644476A priority Critical patent/JPS5380964A/ja
Publication of JPS5380964A publication Critical patent/JPS5380964A/ja
Publication of JPS552732B2 publication Critical patent/JPS552732B2/ja
Granted legal-status Critical Current

Links

JP15644476A 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit Granted JPS5380964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15644476A JPS5380964A (en) 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15644476A JPS5380964A (en) 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit

Publications (2)

Publication Number Publication Date
JPS5380964A true JPS5380964A (en) 1978-07-17
JPS552732B2 JPS552732B2 (enrdf_load_html_response) 1980-01-22

Family

ID=15627873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15644476A Granted JPS5380964A (en) 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit

Country Status (1)

Country Link
JP (1) JPS5380964A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS552732B2 (enrdf_load_html_response) 1980-01-22

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