JPS552732B2 - - Google Patents

Info

Publication number
JPS552732B2
JPS552732B2 JP15644476A JP15644476A JPS552732B2 JP S552732 B2 JPS552732 B2 JP S552732B2 JP 15644476 A JP15644476 A JP 15644476A JP 15644476 A JP15644476 A JP 15644476A JP S552732 B2 JPS552732 B2 JP S552732B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15644476A
Other languages
Japanese (ja)
Other versions
JPS5380964A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15644476A priority Critical patent/JPS5380964A/ja
Publication of JPS5380964A publication Critical patent/JPS5380964A/ja
Publication of JPS552732B2 publication Critical patent/JPS552732B2/ja
Granted legal-status Critical Current

Links

JP15644476A 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit Granted JPS5380964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15644476A JPS5380964A (en) 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15644476A JPS5380964A (en) 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit

Publications (2)

Publication Number Publication Date
JPS5380964A JPS5380964A (en) 1978-07-17
JPS552732B2 true JPS552732B2 (enrdf_load_html_response) 1980-01-22

Family

ID=15627873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15644476A Granted JPS5380964A (en) 1976-12-27 1976-12-27 Forming process of substrate for integrated circuit

Country Status (1)

Country Link
JP (1) JPS5380964A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5380964A (en) 1978-07-17

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