JPS5377848A - Etching method that prevent side etch - Google Patents
Etching method that prevent side etchInfo
- Publication number
- JPS5377848A JPS5377848A JP15394576A JP15394576A JPS5377848A JP S5377848 A JPS5377848 A JP S5377848A JP 15394576 A JP15394576 A JP 15394576A JP 15394576 A JP15394576 A JP 15394576A JP S5377848 A JPS5377848 A JP S5377848A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- prevent side
- side etch
- etch
- prevent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15394576A JPS5377848A (en) | 1976-12-21 | 1976-12-21 | Etching method that prevent side etch |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15394576A JPS5377848A (en) | 1976-12-21 | 1976-12-21 | Etching method that prevent side etch |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5377848A true JPS5377848A (en) | 1978-07-10 |
Family
ID=15573501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15394576A Pending JPS5377848A (en) | 1976-12-21 | 1976-12-21 | Etching method that prevent side etch |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5377848A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5716169A (en) * | 1980-07-02 | 1982-01-27 | Kangiyou Denki Kiki Kk | Chemical etching process |
JPS5792177A (en) * | 1980-12-01 | 1982-06-08 | Mitsubishi Heavy Ind Ltd | Etching method |
EP0095172A2 (en) * | 1982-05-24 | 1983-11-30 | Kangyo Denkikiki Kabushiki Kaisha | Chemical etching method |
WO2004065660A1 (en) * | 2003-01-17 | 2004-08-05 | Toppan Printing Co., Ltd. | Metal photo-etching product and production method therefor |
TWI673121B (en) * | 2018-12-03 | 2019-10-01 | 旭暉應用材料股份有限公司 | Ring metal sheet manufacturing |
-
1976
- 1976-12-21 JP JP15394576A patent/JPS5377848A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5716169A (en) * | 1980-07-02 | 1982-01-27 | Kangiyou Denki Kiki Kk | Chemical etching process |
JPS5815537B2 (en) * | 1980-07-02 | 1983-03-26 | 勧業電気機器株式会社 | chemical etching method |
JPS5792177A (en) * | 1980-12-01 | 1982-06-08 | Mitsubishi Heavy Ind Ltd | Etching method |
EP0095172A2 (en) * | 1982-05-24 | 1983-11-30 | Kangyo Denkikiki Kabushiki Kaisha | Chemical etching method |
US4470872A (en) * | 1982-05-24 | 1984-09-11 | Kangyo Denkikiki Kabushiki Kaisha | Preventing side-etching by adhering an overhang mask to the sidewall with adhesive |
EP0095172A3 (en) * | 1982-05-24 | 1985-06-19 | Kangyo Denkikiki Kabushiki Kaisha | Chemical etching method |
WO2004065660A1 (en) * | 2003-01-17 | 2004-08-05 | Toppan Printing Co., Ltd. | Metal photo-etching product and production method therefor |
JPWO2004065660A1 (en) * | 2003-01-17 | 2006-05-18 | 凸版印刷株式会社 | Metal photoetching product and method of manufacturing the same |
US7498074B2 (en) | 2003-01-17 | 2009-03-03 | Toppan Printing Co., Ltd. | Metal photoetching product and production method thereof |
JP4534984B2 (en) * | 2003-01-17 | 2010-09-01 | 凸版印刷株式会社 | Method for producing metal photoetched product |
KR101094798B1 (en) | 2003-01-17 | 2011-12-16 | 도판 인사츠 가부시키가이샤 | Metal photo-etching product and production method therefor |
US8110344B2 (en) | 2003-01-17 | 2012-02-07 | Toppan Printing Co., Ltd. | Metal photoetching product and production method thereof |
TWI673121B (en) * | 2018-12-03 | 2019-10-01 | 旭暉應用材料股份有限公司 | Ring metal sheet manufacturing |
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