JPS5285943A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS5285943A JPS5285943A JP295476A JP295476A JPS5285943A JP S5285943 A JPS5285943 A JP S5285943A JP 295476 A JP295476 A JP 295476A JP 295476 A JP295476 A JP 295476A JP S5285943 A JPS5285943 A JP S5285943A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP295476A JPS5285943A (en) | 1976-01-13 | 1976-01-13 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP295476A JPS5285943A (en) | 1976-01-13 | 1976-01-13 | Etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5285943A true JPS5285943A (en) | 1977-07-16 |
JPS5530592B2 JPS5530592B2 (en) | 1980-08-12 |
Family
ID=11543749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP295476A Granted JPS5285943A (en) | 1976-01-13 | 1976-01-13 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5285943A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5785355U (en) * | 1980-11-17 | 1982-05-26 |
-
1976
- 1976-01-13 JP JP295476A patent/JPS5285943A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5530592B2 (en) | 1980-08-12 |
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