JPS5285943A - Etching method - Google Patents

Etching method

Info

Publication number
JPS5285943A
JPS5285943A JP295476A JP295476A JPS5285943A JP S5285943 A JPS5285943 A JP S5285943A JP 295476 A JP295476 A JP 295476A JP 295476 A JP295476 A JP 295476A JP S5285943 A JPS5285943 A JP S5285943A
Authority
JP
Japan
Prior art keywords
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP295476A
Other languages
Japanese (ja)
Other versions
JPS5530592B2 (en
Inventor
Yoshiaki Itahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP295476A priority Critical patent/JPS5285943A/en
Publication of JPS5285943A publication Critical patent/JPS5285943A/en
Publication of JPS5530592B2 publication Critical patent/JPS5530592B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP295476A 1976-01-13 1976-01-13 Etching method Granted JPS5285943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP295476A JPS5285943A (en) 1976-01-13 1976-01-13 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP295476A JPS5285943A (en) 1976-01-13 1976-01-13 Etching method

Publications (2)

Publication Number Publication Date
JPS5285943A true JPS5285943A (en) 1977-07-16
JPS5530592B2 JPS5530592B2 (en) 1980-08-12

Family

ID=11543749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP295476A Granted JPS5285943A (en) 1976-01-13 1976-01-13 Etching method

Country Status (1)

Country Link
JP (1) JPS5285943A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5785355U (en) * 1980-11-17 1982-05-26

Also Published As

Publication number Publication date
JPS5530592B2 (en) 1980-08-12

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