JPS5339228A - Sprayyetching method - Google Patents
Sprayyetching methodInfo
- Publication number
- JPS5339228A JPS5339228A JP11307276A JP11307276A JPS5339228A JP S5339228 A JPS5339228 A JP S5339228A JP 11307276 A JP11307276 A JP 11307276A JP 11307276 A JP11307276 A JP 11307276A JP S5339228 A JPS5339228 A JP S5339228A
- Authority
- JP
- Japan
- Prior art keywords
- sprayyetching
- sprayyetching method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11307276A JPS6016099B2 (en) | 1976-09-22 | 1976-09-22 | Spray etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11307276A JPS6016099B2 (en) | 1976-09-22 | 1976-09-22 | Spray etching method |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17112083A Division JPS59103344A (en) | 1983-09-19 | 1983-09-19 | Spray etching apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5339228A true JPS5339228A (en) | 1978-04-11 |
JPS6016099B2 JPS6016099B2 (en) | 1985-04-23 |
Family
ID=14602771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11307276A Expired JPS6016099B2 (en) | 1976-09-22 | 1976-09-22 | Spray etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6016099B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57143477A (en) * | 1981-02-27 | 1982-09-04 | Sony Corp | Treating device |
JPS58196024A (en) * | 1982-05-12 | 1983-11-15 | Oki Electric Ind Co Ltd | Chemical solution processing device for substrate in processing stage of the same to be processed |
JPS61194830A (en) * | 1985-02-25 | 1986-08-29 | Dainippon Screen Mfg Co Ltd | Organic material removing device for substrate |
-
1976
- 1976-09-22 JP JP11307276A patent/JPS6016099B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57143477A (en) * | 1981-02-27 | 1982-09-04 | Sony Corp | Treating device |
JPS58196024A (en) * | 1982-05-12 | 1983-11-15 | Oki Electric Ind Co Ltd | Chemical solution processing device for substrate in processing stage of the same to be processed |
JPS61194830A (en) * | 1985-02-25 | 1986-08-29 | Dainippon Screen Mfg Co Ltd | Organic material removing device for substrate |
JPH0241897B2 (en) * | 1985-02-25 | 1990-09-19 |
Also Published As
Publication number | Publication date |
---|---|
JPS6016099B2 (en) | 1985-04-23 |
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