JPS5339228A - Sprayyetching method - Google Patents

Sprayyetching method

Info

Publication number
JPS5339228A
JPS5339228A JP11307276A JP11307276A JPS5339228A JP S5339228 A JPS5339228 A JP S5339228A JP 11307276 A JP11307276 A JP 11307276A JP 11307276 A JP11307276 A JP 11307276A JP S5339228 A JPS5339228 A JP S5339228A
Authority
JP
Japan
Prior art keywords
sprayyetching
sprayyetching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11307276A
Other languages
Japanese (ja)
Other versions
JPS6016099B2 (en
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11307276A priority Critical patent/JPS6016099B2/en
Publication of JPS5339228A publication Critical patent/JPS5339228A/en
Publication of JPS6016099B2 publication Critical patent/JPS6016099B2/en
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP11307276A 1976-09-22 1976-09-22 Spray etching method Expired JPS6016099B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11307276A JPS6016099B2 (en) 1976-09-22 1976-09-22 Spray etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11307276A JPS6016099B2 (en) 1976-09-22 1976-09-22 Spray etching method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP17112083A Division JPS59103344A (en) 1983-09-19 1983-09-19 liquid spray equipment

Publications (2)

Publication Number Publication Date
JPS5339228A true JPS5339228A (en) 1978-04-11
JPS6016099B2 JPS6016099B2 (en) 1985-04-23

Family

ID=14602771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11307276A Expired JPS6016099B2 (en) 1976-09-22 1976-09-22 Spray etching method

Country Status (1)

Country Link
JP (1) JPS6016099B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143477A (en) * 1981-02-27 1982-09-04 Sony Corp Treating device
JPS58196024A (en) * 1982-05-12 1983-11-15 Oki Electric Ind Co Ltd Chemical solution processing device for substrate in processing stage of the same to be processed
JPS61194830A (en) * 1985-02-25 1986-08-29 Dainippon Screen Mfg Co Ltd Organic material removing device for substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143477A (en) * 1981-02-27 1982-09-04 Sony Corp Treating device
JPS58196024A (en) * 1982-05-12 1983-11-15 Oki Electric Ind Co Ltd Chemical solution processing device for substrate in processing stage of the same to be processed
JPS61194830A (en) * 1985-02-25 1986-08-29 Dainippon Screen Mfg Co Ltd Organic material removing device for substrate

Also Published As

Publication number Publication date
JPS6016099B2 (en) 1985-04-23

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