JPS52142636A - Photooetching method - Google Patents

Photooetching method

Info

Publication number
JPS52142636A
JPS52142636A JP5952176A JP5952176A JPS52142636A JP S52142636 A JPS52142636 A JP S52142636A JP 5952176 A JP5952176 A JP 5952176A JP 5952176 A JP5952176 A JP 5952176A JP S52142636 A JPS52142636 A JP S52142636A
Authority
JP
Japan
Prior art keywords
photooetching
photooetching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5952176A
Other languages
Japanese (ja)
Other versions
JPS5741551B2 (en
Inventor
Kazuto Suehiro
Shigeji Kinoshita
Kazushi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5952176A priority Critical patent/JPS52142636A/en
Publication of JPS52142636A publication Critical patent/JPS52142636A/en
Publication of JPS5741551B2 publication Critical patent/JPS5741551B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP5952176A 1976-05-21 1976-05-21 Photooetching method Granted JPS52142636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5952176A JPS52142636A (en) 1976-05-21 1976-05-21 Photooetching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5952176A JPS52142636A (en) 1976-05-21 1976-05-21 Photooetching method

Publications (2)

Publication Number Publication Date
JPS52142636A true JPS52142636A (en) 1977-11-28
JPS5741551B2 JPS5741551B2 (en) 1982-09-03

Family

ID=13115639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5952176A Granted JPS52142636A (en) 1976-05-21 1976-05-21 Photooetching method

Country Status (1)

Country Link
JP (1) JPS52142636A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347663U (en) * 1977-10-24 1978-04-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347663U (en) * 1977-10-24 1978-04-22

Also Published As

Publication number Publication date
JPS5741551B2 (en) 1982-09-03

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