JPS5741551B2 - - Google Patents
Info
- Publication number
- JPS5741551B2 JPS5741551B2 JP51059521A JP5952176A JPS5741551B2 JP S5741551 B2 JPS5741551 B2 JP S5741551B2 JP 51059521 A JP51059521 A JP 51059521A JP 5952176 A JP5952176 A JP 5952176A JP S5741551 B2 JPS5741551 B2 JP S5741551B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5952176A JPS52142636A (en) | 1976-05-21 | 1976-05-21 | Photooetching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5952176A JPS52142636A (en) | 1976-05-21 | 1976-05-21 | Photooetching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52142636A JPS52142636A (en) | 1977-11-28 |
| JPS5741551B2 true JPS5741551B2 (en) | 1982-09-03 |
Family
ID=13115639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5952176A Granted JPS52142636A (en) | 1976-05-21 | 1976-05-21 | Photooetching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52142636A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5347663U (en) * | 1977-10-24 | 1978-04-22 |
-
1976
- 1976-05-21 JP JP5952176A patent/JPS52142636A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52142636A (en) | 1977-11-28 |