JPS52114443A - Etching method - Google Patents

Etching method

Info

Publication number
JPS52114443A
JPS52114443A JP2988876A JP2988876A JPS52114443A JP S52114443 A JPS52114443 A JP S52114443A JP 2988876 A JP2988876 A JP 2988876A JP 2988876 A JP2988876 A JP 2988876A JP S52114443 A JPS52114443 A JP S52114443A
Authority
JP
Japan
Prior art keywords
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2988876A
Other languages
Japanese (ja)
Inventor
Toshiharu Itou
Shiyousei Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2988876A priority Critical patent/JPS52114443A/en
Publication of JPS52114443A publication Critical patent/JPS52114443A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP2988876A 1976-03-22 1976-03-22 Etching method Pending JPS52114443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2988876A JPS52114443A (en) 1976-03-22 1976-03-22 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2988876A JPS52114443A (en) 1976-03-22 1976-03-22 Etching method

Publications (1)

Publication Number Publication Date
JPS52114443A true JPS52114443A (en) 1977-09-26

Family

ID=12288497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2988876A Pending JPS52114443A (en) 1976-03-22 1976-03-22 Etching method

Country Status (1)

Country Link
JP (1) JPS52114443A (en)

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