JPS52114443A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS52114443A JPS52114443A JP2988876A JP2988876A JPS52114443A JP S52114443 A JPS52114443 A JP S52114443A JP 2988876 A JP2988876 A JP 2988876A JP 2988876 A JP2988876 A JP 2988876A JP S52114443 A JPS52114443 A JP S52114443A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2988876A JPS52114443A (en) | 1976-03-22 | 1976-03-22 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2988876A JPS52114443A (en) | 1976-03-22 | 1976-03-22 | Etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52114443A true JPS52114443A (en) | 1977-09-26 |
Family
ID=12288497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2988876A Pending JPS52114443A (en) | 1976-03-22 | 1976-03-22 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52114443A (en) |
-
1976
- 1976-03-22 JP JP2988876A patent/JPS52114443A/en active Pending
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