JPS52114444A - Plasma etching method - Google Patents

Plasma etching method

Info

Publication number
JPS52114444A
JPS52114444A JP3096676A JP3096676A JPS52114444A JP S52114444 A JPS52114444 A JP S52114444A JP 3096676 A JP3096676 A JP 3096676A JP 3096676 A JP3096676 A JP 3096676A JP S52114444 A JPS52114444 A JP S52114444A
Authority
JP
Japan
Prior art keywords
plasma etching
etching method
plasma
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3096676A
Other languages
Japanese (ja)
Other versions
JPS559464B2 (en
Inventor
Seitarou Matsuo
Yumiko Takehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3096676A priority Critical patent/JPS52114444A/en
Publication of JPS52114444A publication Critical patent/JPS52114444A/en
Publication of JPS559464B2 publication Critical patent/JPS559464B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP3096676A 1976-03-22 1976-03-22 Plasma etching method Granted JPS52114444A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3096676A JPS52114444A (en) 1976-03-22 1976-03-22 Plasma etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3096676A JPS52114444A (en) 1976-03-22 1976-03-22 Plasma etching method

Publications (2)

Publication Number Publication Date
JPS52114444A true JPS52114444A (en) 1977-09-26
JPS559464B2 JPS559464B2 (en) 1980-03-10

Family

ID=12318400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3096676A Granted JPS52114444A (en) 1976-03-22 1976-03-22 Plasma etching method

Country Status (1)

Country Link
JP (1) JPS52114444A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59114840A (en) * 1982-12-22 1984-07-03 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS6415930A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Plasma processing device
JPS6489518A (en) * 1987-09-30 1989-04-04 Nec Corp Parallel flat board electrode type plasma etching device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001024248A1 (en) * 1999-09-27 2001-04-05 Applied Materials, Inc. Hydrocarbon gases for anisotropic etching of metal-containing layers

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4921340A (en) * 1972-06-17 1974-02-25
JPS5036075A (en) * 1973-05-17 1975-04-04
JPS5039876A (en) * 1973-08-11 1975-04-12

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4921340A (en) * 1972-06-17 1974-02-25
JPS5036075A (en) * 1973-05-17 1975-04-04
JPS5039876A (en) * 1973-08-11 1975-04-12

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59114840A (en) * 1982-12-22 1984-07-03 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS6415930A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Plasma processing device
JPS6489518A (en) * 1987-09-30 1989-04-04 Nec Corp Parallel flat board electrode type plasma etching device

Also Published As

Publication number Publication date
JPS559464B2 (en) 1980-03-10

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