JPS52114444A - Plasma etching method - Google Patents
Plasma etching methodInfo
- Publication number
- JPS52114444A JPS52114444A JP3096676A JP3096676A JPS52114444A JP S52114444 A JPS52114444 A JP S52114444A JP 3096676 A JP3096676 A JP 3096676A JP 3096676 A JP3096676 A JP 3096676A JP S52114444 A JPS52114444 A JP S52114444A
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- etching method
- plasma
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3096676A JPS52114444A (en) | 1976-03-22 | 1976-03-22 | Plasma etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3096676A JPS52114444A (en) | 1976-03-22 | 1976-03-22 | Plasma etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52114444A true JPS52114444A (en) | 1977-09-26 |
JPS559464B2 JPS559464B2 (en) | 1980-03-10 |
Family
ID=12318400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3096676A Granted JPS52114444A (en) | 1976-03-22 | 1976-03-22 | Plasma etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52114444A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59114840A (en) * | 1982-12-22 | 1984-07-03 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6415930A (en) * | 1987-07-10 | 1989-01-19 | Hitachi Ltd | Plasma processing device |
JPS6489518A (en) * | 1987-09-30 | 1989-04-04 | Nec Corp | Parallel flat board electrode type plasma etching device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001024248A1 (en) * | 1999-09-27 | 2001-04-05 | Applied Materials, Inc. | Hydrocarbon gases for anisotropic etching of metal-containing layers |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921340A (en) * | 1972-06-17 | 1974-02-25 | ||
JPS5036075A (en) * | 1973-05-17 | 1975-04-04 | ||
JPS5039876A (en) * | 1973-08-11 | 1975-04-12 |
-
1976
- 1976-03-22 JP JP3096676A patent/JPS52114444A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921340A (en) * | 1972-06-17 | 1974-02-25 | ||
JPS5036075A (en) * | 1973-05-17 | 1975-04-04 | ||
JPS5039876A (en) * | 1973-08-11 | 1975-04-12 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59114840A (en) * | 1982-12-22 | 1984-07-03 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6415930A (en) * | 1987-07-10 | 1989-01-19 | Hitachi Ltd | Plasma processing device |
JPS6489518A (en) * | 1987-09-30 | 1989-04-04 | Nec Corp | Parallel flat board electrode type plasma etching device |
Also Published As
Publication number | Publication date |
---|---|
JPS559464B2 (en) | 1980-03-10 |
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