JPS52148305A - Etching method - Google Patents

Etching method

Info

Publication number
JPS52148305A
JPS52148305A JP6580676A JP6580676A JPS52148305A JP S52148305 A JPS52148305 A JP S52148305A JP 6580676 A JP6580676 A JP 6580676A JP 6580676 A JP6580676 A JP 6580676A JP S52148305 A JPS52148305 A JP S52148305A
Authority
JP
Japan
Prior art keywords
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6580676A
Other languages
Japanese (ja)
Other versions
JPS5631268B2 (en
Inventor
Etsuo Sakaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TANAZAWA HAKKOSHA KK
Original Assignee
TANAZAWA HAKKOSHA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TANAZAWA HAKKOSHA KK filed Critical TANAZAWA HAKKOSHA KK
Priority to JP6580676A priority Critical patent/JPS52148305A/en
Publication of JPS52148305A publication Critical patent/JPS52148305A/en
Publication of JPS5631268B2 publication Critical patent/JPS5631268B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP6580676A 1976-06-04 1976-06-04 Etching method Granted JPS52148305A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6580676A JPS52148305A (en) 1976-06-04 1976-06-04 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6580676A JPS52148305A (en) 1976-06-04 1976-06-04 Etching method

Publications (2)

Publication Number Publication Date
JPS52148305A true JPS52148305A (en) 1977-12-09
JPS5631268B2 JPS5631268B2 (en) 1981-07-20

Family

ID=13297627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6580676A Granted JPS52148305A (en) 1976-06-04 1976-06-04 Etching method

Country Status (1)

Country Link
JP (1) JPS52148305A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01306576A (en) * 1988-06-01 1989-12-11 Koyo Seiko Co Ltd Formation of groove for generating dynamic pressure in shaft body
JP2011517058A (en) * 2008-02-06 2011-05-26 ナノ テラ インコーポレイテッド Stencil with removable backing to form micron-sized features on a surface and method of making and using the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893337A (en) * 1972-03-11 1973-12-03
JPS4910129A (en) * 1972-05-29 1974-01-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893337A (en) * 1972-03-11 1973-12-03
JPS4910129A (en) * 1972-05-29 1974-01-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01306576A (en) * 1988-06-01 1989-12-11 Koyo Seiko Co Ltd Formation of groove for generating dynamic pressure in shaft body
JP2011517058A (en) * 2008-02-06 2011-05-26 ナノ テラ インコーポレイテッド Stencil with removable backing to form micron-sized features on a surface and method of making and using the same

Also Published As

Publication number Publication date
JPS5631268B2 (en) 1981-07-20

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