JPS52113337A - Etching method - Google Patents

Etching method

Info

Publication number
JPS52113337A
JPS52113337A JP2499776A JP2499776A JPS52113337A JP S52113337 A JPS52113337 A JP S52113337A JP 2499776 A JP2499776 A JP 2499776A JP 2499776 A JP2499776 A JP 2499776A JP S52113337 A JPS52113337 A JP S52113337A
Authority
JP
Japan
Prior art keywords
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2499776A
Other languages
Japanese (ja)
Inventor
Toshiharu Itou
Shiyousei Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2499776A priority Critical patent/JPS52113337A/en
Publication of JPS52113337A publication Critical patent/JPS52113337A/en
Pending legal-status Critical Current

Links

JP2499776A 1976-03-10 1976-03-10 Etching method Pending JPS52113337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2499776A JPS52113337A (en) 1976-03-10 1976-03-10 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2499776A JPS52113337A (en) 1976-03-10 1976-03-10 Etching method

Publications (1)

Publication Number Publication Date
JPS52113337A true JPS52113337A (en) 1977-09-22

Family

ID=12153605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2499776A Pending JPS52113337A (en) 1976-03-10 1976-03-10 Etching method

Country Status (1)

Country Link
JP (1) JPS52113337A (en)

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