JPS52113337A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS52113337A JPS52113337A JP2499776A JP2499776A JPS52113337A JP S52113337 A JPS52113337 A JP S52113337A JP 2499776 A JP2499776 A JP 2499776A JP 2499776 A JP2499776 A JP 2499776A JP S52113337 A JPS52113337 A JP S52113337A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2499776A JPS52113337A (en) | 1976-03-10 | 1976-03-10 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2499776A JPS52113337A (en) | 1976-03-10 | 1976-03-10 | Etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52113337A true JPS52113337A (en) | 1977-09-22 |
Family
ID=12153605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2499776A Pending JPS52113337A (en) | 1976-03-10 | 1976-03-10 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52113337A (en) |
-
1976
- 1976-03-10 JP JP2499776A patent/JPS52113337A/en active Pending
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