JPS52125430A - Ion etching method - Google Patents

Ion etching method

Info

Publication number
JPS52125430A
JPS52125430A JP4324076A JP4324076A JPS52125430A JP S52125430 A JPS52125430 A JP S52125430A JP 4324076 A JP4324076 A JP 4324076A JP 4324076 A JP4324076 A JP 4324076A JP S52125430 A JPS52125430 A JP S52125430A
Authority
JP
Japan
Prior art keywords
etching method
ion etching
ion
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4324076A
Other languages
Japanese (ja)
Other versions
JPS5811510B2 (en
Inventor
Kenzou Yanagida
Toshihiro Ishizuka
Yuuji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4324076A priority Critical patent/JPS5811510B2/en
Publication of JPS52125430A publication Critical patent/JPS52125430A/en
Publication of JPS5811510B2 publication Critical patent/JPS5811510B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP4324076A 1976-04-15 1976-04-15 Ion etching method Expired JPS5811510B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4324076A JPS5811510B2 (en) 1976-04-15 1976-04-15 Ion etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4324076A JPS5811510B2 (en) 1976-04-15 1976-04-15 Ion etching method

Publications (2)

Publication Number Publication Date
JPS52125430A true JPS52125430A (en) 1977-10-21
JPS5811510B2 JPS5811510B2 (en) 1983-03-03

Family

ID=12658367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4324076A Expired JPS5811510B2 (en) 1976-04-15 1976-04-15 Ion etching method

Country Status (1)

Country Link
JP (1) JPS5811510B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117723A (en) * 1983-11-30 1985-06-25 Fujitsu Ltd Forming method of fine pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117723A (en) * 1983-11-30 1985-06-25 Fujitsu Ltd Forming method of fine pattern
JPH0473291B2 (en) * 1983-11-30 1992-11-20 Fujitsu Ltd

Also Published As

Publication number Publication date
JPS5811510B2 (en) 1983-03-03

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