JPS5376055A - Method of position detection - Google Patents
Method of position detectionInfo
- Publication number
- JPS5376055A JPS5376055A JP15089876A JP15089876A JPS5376055A JP S5376055 A JPS5376055 A JP S5376055A JP 15089876 A JP15089876 A JP 15089876A JP 15089876 A JP15089876 A JP 15089876A JP S5376055 A JPS5376055 A JP S5376055A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mark
- position detection
- radiating
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15089876A JPS5376055A (en) | 1976-12-17 | 1976-12-17 | Method of position detection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15089876A JPS5376055A (en) | 1976-12-17 | 1976-12-17 | Method of position detection |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5376055A true JPS5376055A (en) | 1978-07-06 |
JPS575285B2 JPS575285B2 (ja) | 1982-01-29 |
Family
ID=15506779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15089876A Granted JPS5376055A (en) | 1976-12-17 | 1976-12-17 | Method of position detection |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5376055A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56149445U (ja) * | 1981-02-19 | 1981-11-10 | ||
JPS5895042U (ja) * | 1981-12-21 | 1983-06-28 | 日産自動車株式会社 | V字溝を有する半導体素子 |
JPS59232416A (ja) * | 1983-06-16 | 1984-12-27 | Oki Electric Ind Co Ltd | アライメントマ−ク |
JPS61210630A (ja) * | 1985-03-15 | 1986-09-18 | Toshiba Corp | 位置合わせマ−クの製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5914694U (ja) * | 1982-07-17 | 1984-01-28 | 薮内 庸子 | 人形 |
JPS6313799U (ja) * | 1986-07-14 | 1988-01-29 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS499265A (ja) * | 1972-05-12 | 1974-01-26 |
-
1976
- 1976-12-17 JP JP15089876A patent/JPS5376055A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS499265A (ja) * | 1972-05-12 | 1974-01-26 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56149445U (ja) * | 1981-02-19 | 1981-11-10 | ||
JPS5895042U (ja) * | 1981-12-21 | 1983-06-28 | 日産自動車株式会社 | V字溝を有する半導体素子 |
JPS59232416A (ja) * | 1983-06-16 | 1984-12-27 | Oki Electric Ind Co Ltd | アライメントマ−ク |
JPS61210630A (ja) * | 1985-03-15 | 1986-09-18 | Toshiba Corp | 位置合わせマ−クの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS575285B2 (ja) | 1982-01-29 |
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