JPS5374387A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5374387A JPS5374387A JP15118376A JP15118376A JPS5374387A JP S5374387 A JPS5374387 A JP S5374387A JP 15118376 A JP15118376 A JP 15118376A JP 15118376 A JP15118376 A JP 15118376A JP S5374387 A JPS5374387 A JP S5374387A
- Authority
- JP
- Japan
- Prior art keywords
- impurity
- manufacture
- semiconductor device
- shallow
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15118376A JPS5374387A (en) | 1976-12-15 | 1976-12-15 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15118376A JPS5374387A (en) | 1976-12-15 | 1976-12-15 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5374387A true JPS5374387A (en) | 1978-07-01 |
JPS5718703B2 JPS5718703B2 (ja) | 1982-04-17 |
Family
ID=15513091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15118376A Granted JPS5374387A (en) | 1976-12-15 | 1976-12-15 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5374387A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917207U (ja) * | 1982-07-26 | 1984-02-02 | 森本 英雄 | ロ−タリ−バルブ4サイクルエンジン |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4836981A (ja) * | 1971-09-13 | 1973-05-31 |
-
1976
- 1976-12-15 JP JP15118376A patent/JPS5374387A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4836981A (ja) * | 1971-09-13 | 1973-05-31 |
Also Published As
Publication number | Publication date |
---|---|
JPS5718703B2 (ja) | 1982-04-17 |
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