JPS536297A - Manufacturing process for trichlorosilan and silicon tetrachloride - Google Patents

Manufacturing process for trichlorosilan and silicon tetrachloride

Info

Publication number
JPS536297A
JPS536297A JP8088977A JP8088977A JPS536297A JP S536297 A JPS536297 A JP S536297A JP 8088977 A JP8088977 A JP 8088977A JP 8088977 A JP8088977 A JP 8088977A JP S536297 A JPS536297 A JP S536297A
Authority
JP
Japan
Prior art keywords
trichlorosilan
manufacturing process
silicon tetrachloride
tetrachloride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8088977A
Other languages
English (en)
Japanese (ja)
Inventor
Roiku Hansu
Rooberuto Kapuraa Furitsutsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dynamit Nobel AG
Original Assignee
Dynamit Nobel AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dynamit Nobel AG filed Critical Dynamit Nobel AG
Publication of JPS536297A publication Critical patent/JPS536297A/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/04Hydrides of silicon
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
JP8088977A 1976-07-07 1977-07-06 Manufacturing process for trichlorosilan and silicon tetrachloride Pending JPS536297A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762630542 DE2630542C3 (de) 1976-07-07 1976-07-07 Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrahlorid

Publications (1)

Publication Number Publication Date
JPS536297A true JPS536297A (en) 1978-01-20

Family

ID=5982438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8088977A Pending JPS536297A (en) 1976-07-07 1977-07-06 Manufacturing process for trichlorosilan and silicon tetrachloride

Country Status (9)

Country Link
JP (1) JPS536297A (de)
BE (1) BE856480A (de)
CA (1) CA1085585A (de)
DE (1) DE2630542C3 (de)
ES (1) ES460451A1 (de)
FR (1) FR2357481A1 (de)
GB (1) GB1530986A (de)
IT (1) IT1112065B (de)
NL (1) NL7707499A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172221A (ja) * 1982-02-16 1983-10-11 ゼネラル・エレクトリツク・カンパニイ 珪素を処理してクロロシランを製造する方法
JP2009528252A (ja) * 2006-03-03 2009-08-06 ワッカー ケミー アクチエンゲゼルシャフト クロロシランコンビナート内での高沸点化合物の再利用

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2704975C2 (de) * 1977-02-07 1982-12-23 Wacker-Chemie GmbH, 8000 München Wärmeaustauschvorrichtung für Wirbelbettreaktoren zur Durchführung von Gas/Feststoff-Reaktionen, insbesondere zur Herstellung von Siliciumhalogenverbindungen mittels Silicium-enthaltender Kontaktmassen
JPS5832011A (ja) * 1981-08-17 1983-02-24 Nippon Aerojiru Kk 珪素と塩化水素からトリクロルシランと四塩化珪素を製造する方法
DE3828344C1 (de) * 1988-08-20 1989-07-06 Huels Ag, 4370 Marl, De
US5051248A (en) * 1990-08-15 1991-09-24 Dow Corning Corporation Silane products from reaction of silicon monoxide with hydrogen halides
DE4033611A1 (de) * 1990-10-23 1992-04-30 Huels Chemische Werke Ag Verfahren zur gewinnung von chloridarmer ofenasche bei der umsetzung von rohsilicium zu chlorsilanen
US5160720A (en) * 1990-12-12 1992-11-03 Dow Corning Corporation Metal catalyzed production of tetrachlorosilane
US5176892A (en) * 1990-12-06 1993-01-05 Dow Corning Corporation Supported metal catalyzed production of tetrachlorosilane
US8178051B2 (en) * 2008-11-05 2012-05-15 Stephen Michael Lord Apparatus and process for hydrogenation of a silicon tetrahalide and silicon to the trihalosilane
JP5980308B2 (ja) * 2011-03-25 2016-08-31 エボニック デグサ ゲーエムベーハーEvonik Degussa GmbH フランジ端部又は縁曲げ端部を有する炭化ケイ素管の使用
DE102012216356A1 (de) * 2012-09-14 2014-03-20 Evonik Industries Ag Verfahren zur Herstellung von Chlorsilanen mittels hochsiedender Chlorsilane oder chlorsilanhaltiger Gemische
WO2016099833A1 (en) 2014-12-19 2016-06-23 Dow Corning Corporation Process for preparing monohydrogentrihalosilanes
CN110002449A (zh) * 2019-04-12 2019-07-12 四川永祥多晶硅有限公司 一种氯硅烷精制系统及精制方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU120510A1 (ru) * 1958-05-06 1958-11-30 К.А. Андрианов Способ одновременного получени трихлорсилана и четыреххлористого кремни
GB963745A (en) * 1961-01-05 1964-07-15 British Titan Products Halogenation of silicon-containing materials
US3704104A (en) * 1970-06-01 1972-11-28 Texas Instruments Inc Process for the production of trichlorosilane

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172221A (ja) * 1982-02-16 1983-10-11 ゼネラル・エレクトリツク・カンパニイ 珪素を処理してクロロシランを製造する方法
JPH0448725B2 (de) * 1982-02-16 1992-08-07 Gen Electric
JP2009528252A (ja) * 2006-03-03 2009-08-06 ワッカー ケミー アクチエンゲゼルシャフト クロロシランコンビナート内での高沸点化合物の再利用
US8557210B2 (en) 2006-03-03 2013-10-15 Wacker Chemie Ag Recycling of high-boiling compounds within an integrated chlorosilane system

Also Published As

Publication number Publication date
CA1085585A (en) 1980-09-16
FR2357481A1 (fr) 1978-02-03
IT1112065B (it) 1986-01-13
GB1530986A (en) 1978-11-01
DE2630542B2 (de) 1980-05-08
ES460451A1 (es) 1978-06-01
NL7707499A (nl) 1978-01-10
DE2630542A1 (de) 1978-01-12
DE2630542C3 (de) 1981-04-02
BE856480A (fr) 1977-10-31

Similar Documents

Publication Publication Date Title
JPS5296382A (en) Cable and manufacturing process thereof
JPS5655138A (en) Wafer and production thereof
JPS5346930A (en) Phenoxyyaminoopropanols and process for preparation thereof
DE2961312D1 (en) Process and device for the manufacture of polycrystalline silicon
JPS5285122A (en) Process for manufacturing nnphosphonomethylglycin
GB1543884A (en) Etching composition and etching process
JPS53122684A (en) Method of forming silicon crystal
JPS52106823A (en) Process for manufacturing hydrogenosilane
JPS536297A (en) Manufacturing process for trichlorosilan and silicon tetrachloride
JPS5313719A (en) Windowwmolding carrying member and method of manufacturing the same
JPS532421A (en) Process for manufacturing tetramethylthiurammonosulfide
JPS5370966A (en) Lengthened and flat minute piece manufacturing process and device
JPS5351211A (en) Massive detergent and process thereof
JPS5640254A (en) Semiconductor unit and production thereof
JPS532422A (en) Process for manufacturing tetramethylthiuramtetrasulfide
JPS54157781A (en) Silicon single crystal manufacturing apparatus
JPS532453A (en) Neamin derivatives and process for manufacture thereof
JPS5294283A (en) Bag and method of manufacturing the same
JPS5293994A (en) Method of manufacturing highhvoltage device
IL51552A0 (en) Substituted phenylguanidines and process for their manufacture
JPS52132391A (en) Connector and process for manufacturing thereof
JPS532597A (en) Polyetherrpolyureido and process for producing same
DE3071263D1 (en) A semiconductor device and a method of manufacturing the device
JPS539832A (en) Azamethineecuucomplex compounds and process for manufacture and use thereof
JPS5659616A (en) Manufacture of silicon tetrachloride