JP5980308B2 - フランジ端部又は縁曲げ端部を有する炭化ケイ素管の使用 - Google Patents
フランジ端部又は縁曲げ端部を有する炭化ケイ素管の使用 Download PDFInfo
- Publication number
- JP5980308B2 JP5980308B2 JP2014501505A JP2014501505A JP5980308B2 JP 5980308 B2 JP5980308 B2 JP 5980308B2 JP 2014501505 A JP2014501505 A JP 2014501505A JP 2014501505 A JP2014501505 A JP 2014501505A JP 5980308 B2 JP5980308 B2 JP 5980308B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- xsic
- flange
- edge bend
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/20—Graphite
- C01B32/21—After-treatment
- C01B32/22—Intercalation
- C01B32/225—Expansion; Exfoliation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Silicon Compounds (AREA)
- Sealing Material Composition (AREA)
- Gasket Seals (AREA)
- Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Ceramic Products (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
- Carbon And Carbon Compounds (AREA)
Description
F フランジシール
S、S1、S2 フランジ又は縁曲げ部を有する成形体端部
Claims (2)
- 延伸したコップ状成形体として構成されているxSiC管の、クロロシランの変換法における使用であって、該xSiC管が、一方の端部でフランジ又は縁曲げ部を有し、かつ他方の端部で閉鎖されており、前記xSiC管を、クロロシラン変換のための水素化法に際して、テトラクロロシランをトリクロロシランとする、0.2〜50barの過圧及び900〜1100℃の温度での水素化のために使用する前記xSiC管の使用。
- 前記xSiC管を、炉加熱式の管型反応器中でのクロロシランの変換のために使用する、請求項1記載の使用。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011006111.8 | 2011-03-25 | ||
DE102011006111A DE102011006111A1 (de) | 2011-03-25 | 2011-03-25 | Verwendung von Siliziumcarbidrohren mit Flansch- oder Bördelenden |
DE102011088532.3 | 2011-12-14 | ||
DE102011088532A DE102011088532A1 (de) | 2011-12-14 | 2011-12-14 | Verwendung von Siliziumcarbidrohren mit Flansch- oder Bördelende |
PCT/EP2012/053356 WO2012130547A1 (de) | 2011-03-25 | 2012-02-28 | Verwendung von siliziumcarbidrohren mit flansch- oder bördelende |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014512322A JP2014512322A (ja) | 2014-05-22 |
JP2014512322A5 JP2014512322A5 (ja) | 2015-03-05 |
JP5980308B2 true JP5980308B2 (ja) | 2016-08-31 |
Family
ID=45808834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014501505A Expired - Fee Related JP5980308B2 (ja) | 2011-03-25 | 2012-02-28 | フランジ端部又は縁曲げ端部を有する炭化ケイ素管の使用 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140086815A1 (ja) |
EP (1) | EP2688839B1 (ja) |
JP (1) | JP5980308B2 (ja) |
KR (1) | KR20140010959A (ja) |
CN (1) | CN103443027B (ja) |
TW (1) | TWI579236B (ja) |
WO (1) | WO2012130547A1 (ja) |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2630542C3 (de) * | 1976-07-07 | 1981-04-02 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrahlorid |
US4402720A (en) * | 1980-01-22 | 1983-09-06 | Nippon Telegraph & Telephone Public Corporation | Process for preparing glass preform for optical fiber |
US4309259A (en) * | 1980-05-09 | 1982-01-05 | Motorola, Inc. | High pressure plasma hydrogenation of silicon tetrachloride |
DE19804289A1 (de) * | 1998-02-04 | 1999-08-05 | Sgl Technik Gmbh | Schichtstoffdichtung mit Bördel |
SG125934A1 (en) * | 2003-02-27 | 2006-10-30 | Asahi Glass Co Ltd | Outer tube made of silicon carbide and thermal treatment system for semiconductors |
US20040173597A1 (en) * | 2003-03-03 | 2004-09-09 | Manoj Agrawal | Apparatus for contacting gases at high temperature |
US7588741B2 (en) * | 2004-03-30 | 2009-09-15 | Dunn Jr Wendell E | Cyclical vacuum chlorination processes, including lithium extraction |
DE102005005044A1 (de) * | 2005-02-03 | 2006-08-10 | Consortium für elektrochemische Industrie GmbH | Verfahren zur Herstellung von Trichlorsilan mittels thermischer Hydrierung von Siliciumtetrachlorid |
FR2897299B1 (fr) * | 2006-02-10 | 2008-05-23 | Carbone Lorraine Composants So | Joints d'etancheite multicouches graphites souple/metal adaptes a des conditions de service a haute temperature. |
DE102006050329B3 (de) * | 2006-10-25 | 2007-12-13 | Wacker Chemie Ag | Verfahren zur Herstellung von Trichlorsilan |
JP2008150273A (ja) * | 2006-11-21 | 2008-07-03 | Mitsubishi Materials Corp | トリクロロシラン製造装置 |
US20090255268A1 (en) * | 2008-04-11 | 2009-10-15 | General Electric Company | Divergent cooling thimbles for combustor liners and related method |
JP5316290B2 (ja) * | 2008-08-05 | 2013-10-16 | 三菱マテリアル株式会社 | トリクロロシラン製造装置及び製造方法 |
DE102010000978A1 (de) * | 2010-01-18 | 2011-07-21 | Evonik Degussa GmbH, 45128 | Strömungsrohrreaktor zur Umsetzung von Siliciumtetrachlorid zu Trichlorsilan |
CN103052595A (zh) * | 2010-09-08 | 2013-04-17 | 道康宁公司 | 制备三卤代硅烷的方法 |
US8950618B2 (en) * | 2011-10-03 | 2015-02-10 | Alex V. Degutis | Metallic flange plate with lining |
-
2012
- 2012-02-28 JP JP2014501505A patent/JP5980308B2/ja not_active Expired - Fee Related
- 2012-02-28 EP EP12707519.0A patent/EP2688839B1/de not_active Not-in-force
- 2012-02-28 KR KR1020137024631A patent/KR20140010959A/ko not_active Application Discontinuation
- 2012-02-28 WO PCT/EP2012/053356 patent/WO2012130547A1/de active Application Filing
- 2012-02-28 US US14/005,979 patent/US20140086815A1/en not_active Abandoned
- 2012-02-28 CN CN201280015070.3A patent/CN103443027B/zh not_active Expired - Fee Related
- 2012-03-21 TW TW101109700A patent/TWI579236B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI579236B (zh) | 2017-04-21 |
KR20140010959A (ko) | 2014-01-27 |
JP2014512322A (ja) | 2014-05-22 |
EP2688839B1 (de) | 2016-09-14 |
US20140086815A1 (en) | 2014-03-27 |
WO2012130547A1 (de) | 2012-10-04 |
TW201302610A (zh) | 2013-01-16 |
CN103443027A (zh) | 2013-12-11 |
EP2688839A1 (de) | 2014-01-29 |
CN103443027B (zh) | 2016-07-06 |
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