JPS5355978A - Vaccuum type vapor growth device - Google Patents

Vaccuum type vapor growth device

Info

Publication number
JPS5355978A
JPS5355978A JP13087276A JP13087276A JPS5355978A JP S5355978 A JPS5355978 A JP S5355978A JP 13087276 A JP13087276 A JP 13087276A JP 13087276 A JP13087276 A JP 13087276A JP S5355978 A JPS5355978 A JP S5355978A
Authority
JP
Japan
Prior art keywords
vaccuum
growth device
vapor growth
type vapor
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13087276A
Other languages
Japanese (ja)
Inventor
Yasuo Narutomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13087276A priority Critical patent/JPS5355978A/en
Publication of JPS5355978A publication Critical patent/JPS5355978A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To secure an easy removal of a furnace core tube as well as to obtain a thin film of reduced pinhole on the substrate, by providing an auxiliary furnace core tube containing a guide rail within the furnace core tube which shust out the open air and also providing a tray on which a boat is put onto the guide rail.
JP13087276A 1976-10-29 1976-10-29 Vaccuum type vapor growth device Pending JPS5355978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13087276A JPS5355978A (en) 1976-10-29 1976-10-29 Vaccuum type vapor growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13087276A JPS5355978A (en) 1976-10-29 1976-10-29 Vaccuum type vapor growth device

Publications (1)

Publication Number Publication Date
JPS5355978A true JPS5355978A (en) 1978-05-20

Family

ID=15044659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13087276A Pending JPS5355978A (en) 1976-10-29 1976-10-29 Vaccuum type vapor growth device

Country Status (1)

Country Link
JP (1) JPS5355978A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628636A (en) * 1979-08-15 1981-03-20 Mitsubishi Electric Corp Cvd film forming apparatus
JPS60129133U (en) * 1984-02-07 1985-08-30 株式会社日立国際電気 Quartz boat for oxide film production
JPH04180619A (en) * 1990-11-15 1992-06-26 Nec Yamagata Ltd Horizontal type reactor for semiconductor manufacturing
CN111455354A (en) * 2020-05-22 2020-07-28 湖南红太阳光电科技有限公司 Boat inlet and outlet device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment and tubular PECVD equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628636A (en) * 1979-08-15 1981-03-20 Mitsubishi Electric Corp Cvd film forming apparatus
JPS6348838B2 (en) * 1979-08-15 1988-09-30 Mitsubishi Denki Kk
JPS60129133U (en) * 1984-02-07 1985-08-30 株式会社日立国際電気 Quartz boat for oxide film production
JPH0227563Y2 (en) * 1984-02-07 1990-07-25
JPH04180619A (en) * 1990-11-15 1992-06-26 Nec Yamagata Ltd Horizontal type reactor for semiconductor manufacturing
CN111455354A (en) * 2020-05-22 2020-07-28 湖南红太阳光电科技有限公司 Boat inlet and outlet device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment and tubular PECVD equipment

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