JPS60129133U - Quartz boat for oxide film production - Google Patents
Quartz boat for oxide film productionInfo
- Publication number
- JPS60129133U JPS60129133U JP1501584U JP1501584U JPS60129133U JP S60129133 U JPS60129133 U JP S60129133U JP 1501584 U JP1501584 U JP 1501584U JP 1501584 U JP1501584 U JP 1501584U JP S60129133 U JPS60129133 U JP S60129133U
- Authority
- JP
- Japan
- Prior art keywords
- inner tube
- tube
- oxide film
- quartz boat
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案を実施した石英ボートとウエハの斜視図
、第２図は本考案による石英ボートの構造例図で、Ａは
上面図、Ｂは側面図、Ｃ（ま２重反応曽とウェハを含む
ボートの横断面図である。
１・・・ウエハ、２・・・石英ボート、２ａ〜２ｄ・・
・ボート２の各部分、３・・・ウエハ保持用スリット部
、４・・・内部反応管、５・・・外部反応管。Figure 1 is a perspective view of a quartz boat and wafer according to the present invention, and Figure 2 is a structural example of a quartz boat according to the present invention, where A is a top view, B is a side view, and C (double reaction It is a cross-sectional view of a boat containing wafers. 1... Wafer, 2... Quartz boat, 2a to 2d...
- Each part of the boat 2, 3... Wafer holding slit section, 4... Internal reaction tube, 5... External reaction tube.
Claims (1)
けた溝に沿って内覧と外管の間隙を移動する支持台と、
二の支持台上に設けられて内管又、内部に管軸方向に出
入可能でかつ間隔的３ｍｍで各裏面を向い合わせた２枚
１組のウエハを反応管軸と直角で内管内壁から約９ｍの
間隔−で挿入保持するために内管のほぼ半円周に沿って
−３か暫に設けたスリット部を内管管軸＆と沿って隣接
対向するウェハの表面間の間隔を約１６ｍｍになるよう
に上記管軸方向に複数個設けたつ止へ支持用アームとを
８備することを特徴とする酸化膜生成用石英ボート。a support stand that moves in the gap between the inner tube and the outer tube along a groove provided in the axial direction of the inner tube of the CVD device having a double reaction tube;
A set of two wafers, each with their back faces facing each other with a spacing of 3 mm, is inserted into the inner tube from the inner wall of the inner tube at right angles to the reaction tube axis. In order to insert and hold wafers at intervals of approximately 9 m, slits are provided along approximately the semicircumference of the inner tube to maintain the distance between the surfaces of adjacent and opposing wafers along the axis of the inner tube. A quartz boat for producing an oxide film, characterized in that it is equipped with eight supporting arms arranged in plurality in the tube axis direction so as to have a length of 16 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1501584U JPS60129133U (en) | 1984-02-07 | 1984-02-07 | Quartz boat for oxide film production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1501584U JPS60129133U (en) | 1984-02-07 | 1984-02-07 | Quartz boat for oxide film production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60129133U true JPS60129133U (en) | 1985-08-30 |
| JPH0227563Y2 JPH0227563Y2 (en) | 1990-07-25 |
Family
ID=30500468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1501584U Granted JPS60129133U (en) | 1984-02-07 | 1984-02-07 | Quartz boat for oxide film production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60129133U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5355978A (en) * | 1976-10-29 | 1978-05-20 | Nec Corp | Vaccuum type vapor growth device |
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS5720143U (en) * | 1980-07-08 | 1982-02-02 | ||
| JPS5844834U (en) * | 1981-09-18 | 1983-03-25 | 日本電気ホームエレクトロニクス株式会社 | semiconductor manufacturing equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5720143B2 (en) * | 1974-01-29 | 1982-04-27 | ||
| JPS5844834B2 (en) * | 1979-07-31 | 1983-10-05 | 国産金属工業株式会社 | combination lock |
-
1984
- 1984-02-07 JP JP1501584U patent/JPS60129133U/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5355978A (en) * | 1976-10-29 | 1978-05-20 | Nec Corp | Vaccuum type vapor growth device |
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS5720143U (en) * | 1980-07-08 | 1982-02-02 | ||
| JPS5844834U (en) * | 1981-09-18 | 1983-03-25 | 日本電気ホームエレクトロニクス株式会社 | semiconductor manufacturing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0227563Y2 (en) | 1990-07-25 |
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