JPS5339874A - Vacuum pincette - Google Patents

Vacuum pincette

Info

Publication number
JPS5339874A
JPS5339874A JP11368976A JP11368976A JPS5339874A JP S5339874 A JPS5339874 A JP S5339874A JP 11368976 A JP11368976 A JP 11368976A JP 11368976 A JP11368976 A JP 11368976A JP S5339874 A JPS5339874 A JP S5339874A
Authority
JP
Japan
Prior art keywords
vacuum pincette
pincette
vacuum
wafers
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11368976A
Other languages
Japanese (ja)
Inventor
Akiyoshi Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11368976A priority Critical patent/JPS5339874A/en
Publication of JPS5339874A publication Critical patent/JPS5339874A/en
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Abstract

PURPOSE: To smoothly detaches wafers by providing a valve mechanism for changing over of air suction line.
COPYRIGHT: (C)1978,JPO&Japio
JP11368976A 1976-09-24 1976-09-24 Vacuum pincette Pending JPS5339874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11368976A JPS5339874A (en) 1976-09-24 1976-09-24 Vacuum pincette

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11368976A JPS5339874A (en) 1976-09-24 1976-09-24 Vacuum pincette

Publications (1)

Publication Number Publication Date
JPS5339874A true JPS5339874A (en) 1978-04-12

Family

ID=14618677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11368976A Pending JPS5339874A (en) 1976-09-24 1976-09-24 Vacuum pincette

Country Status (1)

Country Link
JP (1) JPS5339874A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744594A (en) * 1985-12-10 1988-05-17 Recif (Societe Anonyme) Vacuum handling especially for the use in handling silicon wafers
US4767142A (en) * 1986-08-01 1988-08-30 Kiyoshi Takahashi Forceps for semiconductor silicon wafer
US4981315A (en) * 1987-12-22 1991-01-01 Recif, S.A. Tip for a vacuum pipette
US5118153A (en) * 1991-03-06 1992-06-02 H-Square Corporation Hand-operated reciprocating bellows for electronic component pickup
US5169192A (en) * 1991-06-28 1992-12-08 H-Square Corporation Electronic article pickup tool
JPH04133573U (en) * 1992-04-10 1992-12-11 清 高橋 vacuum tweezers
CN105612029A (en) * 2013-09-30 2016-05-25 Ub技术源株式会社 Product transfer device using vacuum

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744594A (en) * 1985-12-10 1988-05-17 Recif (Societe Anonyme) Vacuum handling especially for the use in handling silicon wafers
US4767142A (en) * 1986-08-01 1988-08-30 Kiyoshi Takahashi Forceps for semiconductor silicon wafer
US4981315A (en) * 1987-12-22 1991-01-01 Recif, S.A. Tip for a vacuum pipette
US5118153A (en) * 1991-03-06 1992-06-02 H-Square Corporation Hand-operated reciprocating bellows for electronic component pickup
US5169192A (en) * 1991-06-28 1992-12-08 H-Square Corporation Electronic article pickup tool
JPH04133573U (en) * 1992-04-10 1992-12-11 清 高橋 vacuum tweezers
CN105612029A (en) * 2013-09-30 2016-05-25 Ub技术源株式会社 Product transfer device using vacuum

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