JPS53135572A - Tool holding adsorption - Google Patents

Tool holding adsorption

Info

Publication number
JPS53135572A
JPS53135572A JP4995077A JP4995077A JPS53135572A JP S53135572 A JPS53135572 A JP S53135572A JP 4995077 A JP4995077 A JP 4995077A JP 4995077 A JP4995077 A JP 4995077A JP S53135572 A JPS53135572 A JP S53135572A
Authority
JP
Japan
Prior art keywords
tool holding
adsorbing
holding adsorption
wafer
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4995077A
Other languages
Japanese (ja)
Other versions
JPS6042616B2 (en
Inventor
Masao Tsugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4995077A priority Critical patent/JPS6042616B2/en
Publication of JPS53135572A publication Critical patent/JPS53135572A/en
Publication of JPS6042616B2 publication Critical patent/JPS6042616B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

PURPOSE: To ensure the adsorbing holding of a wafer, by attracting a wafer at a remote location through the use of an air jet adsorbing mechanism having a strong adsorbing force, and by giving vaccum attracting operation to the adsorbing mechanism.
COPYRIGHT: (C)1978,JPO&Japio
JP4995077A 1977-05-02 1977-05-02 Wafer suction holding method Expired JPS6042616B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4995077A JPS6042616B2 (en) 1977-05-02 1977-05-02 Wafer suction holding method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4995077A JPS6042616B2 (en) 1977-05-02 1977-05-02 Wafer suction holding method

Publications (2)

Publication Number Publication Date
JPS53135572A true JPS53135572A (en) 1978-11-27
JPS6042616B2 JPS6042616B2 (en) 1985-09-24

Family

ID=12845301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4995077A Expired JPS6042616B2 (en) 1977-05-02 1977-05-02 Wafer suction holding method

Country Status (1)

Country Link
JP (1) JPS6042616B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882521A (en) * 1981-07-10 1983-05-18 Hitachi Ltd Spinner
JPH0593524U (en) * 1992-05-25 1993-12-21 コマツ電子金属株式会社 Vacuum pressure filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882521A (en) * 1981-07-10 1983-05-18 Hitachi Ltd Spinner
JPH0593524U (en) * 1992-05-25 1993-12-21 コマツ電子金属株式会社 Vacuum pressure filter

Also Published As

Publication number Publication date
JPS6042616B2 (en) 1985-09-24

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