JPS5222883A - Air cleaner unit for semiconductor unit - Google Patents
Air cleaner unit for semiconductor unitInfo
- Publication number
- JPS5222883A JPS5222883A JP9914975A JP9914975A JPS5222883A JP S5222883 A JPS5222883 A JP S5222883A JP 9914975 A JP9914975 A JP 9914975A JP 9914975 A JP9914975 A JP 9914975A JP S5222883 A JPS5222883 A JP S5222883A
- Authority
- JP
- Japan
- Prior art keywords
- unit
- air cleaner
- air
- semiconductor
- cleaner unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ventilation (AREA)
Abstract
PURPOSE: To improve air and gas screen effect between an operation room and outer space by an air cartain, and to get an air cleaner unit effectively using the cleaned air.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9914975A JPS5222883A (en) | 1975-08-14 | 1975-08-14 | Air cleaner unit for semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9914975A JPS5222883A (en) | 1975-08-14 | 1975-08-14 | Air cleaner unit for semiconductor unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5222883A true JPS5222883A (en) | 1977-02-21 |
JPS5329578B2 JPS5329578B2 (en) | 1978-08-22 |
Family
ID=14239623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9914975A Granted JPS5222883A (en) | 1975-08-14 | 1975-08-14 | Air cleaner unit for semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5222883A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52108648A (en) * | 1976-03-05 | 1977-09-12 | Svenska Flaektfabriken Ab | Exhausting system for cooking method of guiding air stream produced from airrpermeable surface* particularly perforated surface and apparatus for carrying out the same method |
US4707167A (en) * | 1985-09-10 | 1987-11-17 | Aoki Corporation | Air sterilization filter |
US4832717A (en) * | 1988-05-10 | 1989-05-23 | Nu Aire, Inc. | Clean air cabinet |
JPH01170014A (en) * | 1987-12-01 | 1989-07-05 | Varian Assoc Inc | Horizontal stream air folw work station |
US4987673A (en) * | 1987-06-18 | 1991-01-29 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for packaging semiconductor devices |
US5015425A (en) * | 1984-11-22 | 1991-05-14 | Hitachi, Ltd. | Manufacturing apparatus |
US5665128A (en) * | 1995-12-05 | 1997-09-09 | Nuaire, Inc. | Clean air cabinet with valved exhaust |
-
1975
- 1975-08-14 JP JP9914975A patent/JPS5222883A/en active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52108648A (en) * | 1976-03-05 | 1977-09-12 | Svenska Flaektfabriken Ab | Exhausting system for cooking method of guiding air stream produced from airrpermeable surface* particularly perforated surface and apparatus for carrying out the same method |
JPS5647451B2 (en) * | 1976-03-05 | 1981-11-10 | ||
US5015425A (en) * | 1984-11-22 | 1991-05-14 | Hitachi, Ltd. | Manufacturing apparatus |
US4707167A (en) * | 1985-09-10 | 1987-11-17 | Aoki Corporation | Air sterilization filter |
US4987673A (en) * | 1987-06-18 | 1991-01-29 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for packaging semiconductor devices |
JPH01170014A (en) * | 1987-12-01 | 1989-07-05 | Varian Assoc Inc | Horizontal stream air folw work station |
JP2562359B2 (en) * | 1987-12-01 | 1996-12-11 | バリアン・アソシエイツ・インコーポレイテッド | Horizontal stratified air flow workstation |
US4832717A (en) * | 1988-05-10 | 1989-05-23 | Nu Aire, Inc. | Clean air cabinet |
US5665128A (en) * | 1995-12-05 | 1997-09-09 | Nuaire, Inc. | Clean air cabinet with valved exhaust |
Also Published As
Publication number | Publication date |
---|---|
JPS5329578B2 (en) | 1978-08-22 |
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