JPS5348490A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5348490A JPS5348490A JP12278076A JP12278076A JPS5348490A JP S5348490 A JPS5348490 A JP S5348490A JP 12278076 A JP12278076 A JP 12278076A JP 12278076 A JP12278076 A JP 12278076A JP S5348490 A JPS5348490 A JP S5348490A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- gates
- ccd
- layer silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Landscapes
- Weting (AREA)
- Semiconductor Memories (AREA)
Abstract
PURPOSE: To obtain a CCD having more than two gates in extreme proximity by slightly correcting a 1-layer silicon gate process.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12278076A JPS5348490A (en) | 1976-10-15 | 1976-10-15 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12278076A JPS5348490A (en) | 1976-10-15 | 1976-10-15 | Production of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5348490A true JPS5348490A (en) | 1978-05-01 |
Family
ID=14844416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12278076A Pending JPS5348490A (en) | 1976-10-15 | 1976-10-15 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5348490A (en) |
-
1976
- 1976-10-15 JP JP12278076A patent/JPS5348490A/en active Pending
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