JPS5340291A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5340291A
JPS5340291A JP11471976A JP11471976A JPS5340291A JP S5340291 A JPS5340291 A JP S5340291A JP 11471976 A JP11471976 A JP 11471976A JP 11471976 A JP11471976 A JP 11471976A JP S5340291 A JPS5340291 A JP S5340291A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
insulator film
wirings
decrease
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11471976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118340B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Masuhara
Hideo Sunami
Yoshiaki Kamigaki
Tetsukazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11471976A priority Critical patent/JPS5340291A/ja
Publication of JPS5340291A publication Critical patent/JPS5340291A/ja
Publication of JPS6118340B2 publication Critical patent/JPS6118340B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP11471976A 1976-09-27 1976-09-27 Manufacture of semiconductor device Granted JPS5340291A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11471976A JPS5340291A (en) 1976-09-27 1976-09-27 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11471976A JPS5340291A (en) 1976-09-27 1976-09-27 Manufacture of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9360485A Division JPS6110255A (ja) 1985-05-02 1985-05-02 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5340291A true JPS5340291A (en) 1978-04-12
JPS6118340B2 JPS6118340B2 (enrdf_load_stackoverflow) 1986-05-12

Family

ID=14644897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11471976A Granted JPS5340291A (en) 1976-09-27 1976-09-27 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5340291A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779663A (en) * 1980-11-05 1982-05-18 Fujitsu Ltd Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779663A (en) * 1980-11-05 1982-05-18 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS6118340B2 (enrdf_load_stackoverflow) 1986-05-12

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