JPS538571A - Manufacture of inverted-mesa type semiconductor device - Google Patents
Manufacture of inverted-mesa type semiconductor deviceInfo
- Publication number
- JPS538571A JPS538571A JP8311876A JP8311876A JPS538571A JP S538571 A JPS538571 A JP S538571A JP 8311876 A JP8311876 A JP 8311876A JP 8311876 A JP8311876 A JP 8311876A JP S538571 A JPS538571 A JP S538571A
- Authority
- JP
- Japan
- Prior art keywords
- inverted
- manufacture
- semiconductor device
- type semiconductor
- mesa type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thyristors (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To prevent the breakage by forming the 2-streak mesa groove between each mesa and by making a thick depth part between the two streaks of the groove. And both the protective film and the electrode are formed simultaneously for all elements under a wafer state.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8311876A JPS5951150B2 (en) | 1976-07-13 | 1976-07-13 | Manufacturing method for inverted mesa semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8311876A JPS5951150B2 (en) | 1976-07-13 | 1976-07-13 | Manufacturing method for inverted mesa semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS538571A true JPS538571A (en) | 1978-01-26 |
JPS5951150B2 JPS5951150B2 (en) | 1984-12-12 |
Family
ID=13793277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8311876A Expired JPS5951150B2 (en) | 1976-07-13 | 1976-07-13 | Manufacturing method for inverted mesa semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5951150B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4969020A (en) * | 1985-02-26 | 1990-11-06 | Nissan Motor Company Limited | Semiconductor device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61150902U (en) * | 1985-03-12 | 1986-09-18 |
-
1976
- 1976-07-13 JP JP8311876A patent/JPS5951150B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4969020A (en) * | 1985-02-26 | 1990-11-06 | Nissan Motor Company Limited | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5951150B2 (en) | 1984-12-12 |
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