JPS538571A - Manufacture of inverted-mesa type semiconductor device - Google Patents

Manufacture of inverted-mesa type semiconductor device

Info

Publication number
JPS538571A
JPS538571A JP8311876A JP8311876A JPS538571A JP S538571 A JPS538571 A JP S538571A JP 8311876 A JP8311876 A JP 8311876A JP 8311876 A JP8311876 A JP 8311876A JP S538571 A JPS538571 A JP S538571A
Authority
JP
Japan
Prior art keywords
inverted
manufacture
semiconductor device
type semiconductor
mesa type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8311876A
Other languages
Japanese (ja)
Other versions
JPS5951150B2 (en
Inventor
Akira Kojima
Kazuyoshi Kobayashi
Norio Suzuki
Kiyoshi Ujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP8311876A priority Critical patent/JPS5951150B2/en
Publication of JPS538571A publication Critical patent/JPS538571A/en
Publication of JPS5951150B2 publication Critical patent/JPS5951150B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE:To prevent the breakage by forming the 2-streak mesa groove between each mesa and by making a thick depth part between the two streaks of the groove. And both the protective film and the electrode are formed simultaneously for all elements under a wafer state.
JP8311876A 1976-07-13 1976-07-13 Manufacturing method for inverted mesa semiconductor device Expired JPS5951150B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8311876A JPS5951150B2 (en) 1976-07-13 1976-07-13 Manufacturing method for inverted mesa semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8311876A JPS5951150B2 (en) 1976-07-13 1976-07-13 Manufacturing method for inverted mesa semiconductor device

Publications (2)

Publication Number Publication Date
JPS538571A true JPS538571A (en) 1978-01-26
JPS5951150B2 JPS5951150B2 (en) 1984-12-12

Family

ID=13793277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8311876A Expired JPS5951150B2 (en) 1976-07-13 1976-07-13 Manufacturing method for inverted mesa semiconductor device

Country Status (1)

Country Link
JP (1) JPS5951150B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4969020A (en) * 1985-02-26 1990-11-06 Nissan Motor Company Limited Semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150902U (en) * 1985-03-12 1986-09-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4969020A (en) * 1985-02-26 1990-11-06 Nissan Motor Company Limited Semiconductor device

Also Published As

Publication number Publication date
JPS5951150B2 (en) 1984-12-12

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