JPS5340271A - Semiconductor diffusing method - Google Patents

Semiconductor diffusing method

Info

Publication number
JPS5340271A
JPS5340271A JP11477376A JP11477376A JPS5340271A JP S5340271 A JPS5340271 A JP S5340271A JP 11477376 A JP11477376 A JP 11477376A JP 11477376 A JP11477376 A JP 11477376A JP S5340271 A JPS5340271 A JP S5340271A
Authority
JP
Japan
Prior art keywords
type
diffusing method
semiconductor
diffused
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11477376A
Other languages
Japanese (ja)
Inventor
Sadao Okano
Takuzo Ogawa
Mitsuru Ura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11477376A priority Critical patent/JPS5340271A/en
Publication of JPS5340271A publication Critical patent/JPS5340271A/en
Pending legal-status Critical Current

Links

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  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: On a N-type region surface to which impurities will be diffused, SiO2 film is selectively formed, and then GaAs and Al2O3 are heated at once in the same container to diffuse Ga and Al into a N-type region; the region which is not covered with a SiO2 film, As is diffused, thereby simultaneously diffusing P-type and N-type impurities.
COPYRIGHT: (C)1978,JPO&Japio
JP11477376A 1976-09-27 1976-09-27 Semiconductor diffusing method Pending JPS5340271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11477376A JPS5340271A (en) 1976-09-27 1976-09-27 Semiconductor diffusing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11477376A JPS5340271A (en) 1976-09-27 1976-09-27 Semiconductor diffusing method

Publications (1)

Publication Number Publication Date
JPS5340271A true JPS5340271A (en) 1978-04-12

Family

ID=14646320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11477376A Pending JPS5340271A (en) 1976-09-27 1976-09-27 Semiconductor diffusing method

Country Status (1)

Country Link
JP (1) JPS5340271A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7293317B2 (en) 2002-07-22 2007-11-13 Uni-Charm Corporation Holding device and cleaning tool with the holding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7293317B2 (en) 2002-07-22 2007-11-13 Uni-Charm Corporation Holding device and cleaning tool with the holding device

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