JPS5334483A - Substrate for semiconductor integrating circuit - Google Patents
Substrate for semiconductor integrating circuitInfo
- Publication number
- JPS5334483A JPS5334483A JP10774777A JP10774777A JPS5334483A JP S5334483 A JPS5334483 A JP S5334483A JP 10774777 A JP10774777 A JP 10774777A JP 10774777 A JP10774777 A JP 10774777A JP S5334483 A JPS5334483 A JP S5334483A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- integrating circuit
- semiconductor integrating
- layer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To obtain the IC substrate superior in electric performance, by inserting the multi crystal Si layer between the mono crystal island domain and the contact layer, in adhering and bonding two semiconductor substrates via oxide dielectric insulating layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10774777A JPS5334483A (en) | 1977-09-09 | 1977-09-09 | Substrate for semiconductor integrating circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10774777A JPS5334483A (en) | 1977-09-09 | 1977-09-09 | Substrate for semiconductor integrating circuit |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10781076A Division JPS5333590A (en) | 1976-09-01 | 1976-09-10 | Production of substrate for semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5334483A true JPS5334483A (en) | 1978-03-31 |
Family
ID=14466932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10774777A Pending JPS5334483A (en) | 1977-09-09 | 1977-09-09 | Substrate for semiconductor integrating circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5334483A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63260148A (en) * | 1987-04-17 | 1988-10-27 | Nec Corp | Dielectric isolation substrate |
US4985745A (en) * | 1988-01-05 | 1991-01-15 | Kabushiki Kaisha Toshiba | Substrate structure for composite semiconductor device |
JPH07263541A (en) * | 1994-03-24 | 1995-10-13 | Nec Corp | Dielectric separation substrate and manufacture thereof |
-
1977
- 1977-09-09 JP JP10774777A patent/JPS5334483A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63260148A (en) * | 1987-04-17 | 1988-10-27 | Nec Corp | Dielectric isolation substrate |
US4985745A (en) * | 1988-01-05 | 1991-01-15 | Kabushiki Kaisha Toshiba | Substrate structure for composite semiconductor device |
JPH07263541A (en) * | 1994-03-24 | 1995-10-13 | Nec Corp | Dielectric separation substrate and manufacture thereof |
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