JPS5440077A - Manufacture of semiconductor integrated circuit device substrate - Google Patents

Manufacture of semiconductor integrated circuit device substrate

Info

Publication number
JPS5440077A
JPS5440077A JP10700477A JP10700477A JPS5440077A JP S5440077 A JPS5440077 A JP S5440077A JP 10700477 A JP10700477 A JP 10700477A JP 10700477 A JP10700477 A JP 10700477A JP S5440077 A JPS5440077 A JP S5440077A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
semiconductor integrated
circuit device
device substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10700477A
Other languages
Japanese (ja)
Inventor
Toshio Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10700477A priority Critical patent/JPS5440077A/en
Publication of JPS5440077A publication Critical patent/JPS5440077A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To form a substrate with a necessary layer thickness anf flatness by thinning one of the two sheets of the Si wafers bonded together holding the insulator layer between via the etching and anode oxidation methods.
COPYRIGHT: (C)1979,JPO&Japio
JP10700477A 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate Pending JPS5440077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10700477A JPS5440077A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10700477A JPS5440077A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate

Publications (1)

Publication Number Publication Date
JPS5440077A true JPS5440077A (en) 1979-03-28

Family

ID=14448040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10700477A Pending JPS5440077A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate

Country Status (1)

Country Link
JP (1) JPS5440077A (en)

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