JPS5440077A - Manufacture of semiconductor integrated circuit device substrate - Google Patents
Manufacture of semiconductor integrated circuit device substrateInfo
- Publication number
- JPS5440077A JPS5440077A JP10700477A JP10700477A JPS5440077A JP S5440077 A JPS5440077 A JP S5440077A JP 10700477 A JP10700477 A JP 10700477A JP 10700477 A JP10700477 A JP 10700477A JP S5440077 A JPS5440077 A JP S5440077A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- semiconductor integrated
- circuit device
- device substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To form a substrate with a necessary layer thickness anf flatness by thinning one of the two sheets of the Si wafers bonded together holding the insulator layer between via the etching and anode oxidation methods.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10700477A JPS5440077A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor integrated circuit device substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10700477A JPS5440077A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor integrated circuit device substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5440077A true JPS5440077A (en) | 1979-03-28 |
Family
ID=14448040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10700477A Pending JPS5440077A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor integrated circuit device substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5440077A (en) |
-
1977
- 1977-09-05 JP JP10700477A patent/JPS5440077A/en active Pending
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