JPS5334471A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5334471A
JPS5334471A JP10788476A JP10788476A JPS5334471A JP S5334471 A JPS5334471 A JP S5334471A JP 10788476 A JP10788476 A JP 10788476A JP 10788476 A JP10788476 A JP 10788476A JP S5334471 A JPS5334471 A JP S5334471A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
mask
gas
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10788476A
Other languages
Japanese (ja)
Inventor
Teisuke Komuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10788476A priority Critical patent/JPS5334471A/en
Publication of JPS5334471A publication Critical patent/JPS5334471A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To make copy surely and obtain a good print, by providing the gas outlets to both the semiconductor wafer and optical mask and exhausting the gas caught between the mask and the lacquar on the wafer smoothly.
COPYRIGHT: (C)1978,JPO&Japio
JP10788476A 1976-09-10 1976-09-10 Manufacture for semiconductor device Pending JPS5334471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10788476A JPS5334471A (en) 1976-09-10 1976-09-10 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10788476A JPS5334471A (en) 1976-09-10 1976-09-10 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5334471A true JPS5334471A (en) 1978-03-31

Family

ID=14470511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10788476A Pending JPS5334471A (en) 1976-09-10 1976-09-10 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5334471A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002538117A (en) * 1999-02-26 2002-11-12 アベンティス・ファーマ・ドイチユラント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Use of polycyclic 2-aminothiazoles for the manufacture of a medicament for the prevention or treatment of obesity

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002538117A (en) * 1999-02-26 2002-11-12 アベンティス・ファーマ・ドイチユラント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Use of polycyclic 2-aminothiazoles for the manufacture of a medicament for the prevention or treatment of obesity
JP4728483B2 (en) * 1999-02-26 2011-07-20 サノフィ−アベンティス・ドイチュラント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Use of polycyclic 2-aminothiazoles for the manufacture of a medicament for the prevention or treatment of obesity

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