JPS5324785A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5324785A
JPS5324785A JP9868076A JP9868076A JPS5324785A JP S5324785 A JPS5324785 A JP S5324785A JP 9868076 A JP9868076 A JP 9868076A JP 9868076 A JP9868076 A JP 9868076A JP S5324785 A JPS5324785 A JP S5324785A
Authority
JP
Japan
Prior art keywords
semiconductor device
fets
insulator
electrodes
spacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9868076A
Other languages
Japanese (ja)
Inventor
Katsutoshi Saito
Susumu Takahashi
Masahide Tokuda
Kiichiro Mukai
Hitoshi Satou
Hiroshi Kodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9868076A priority Critical patent/JPS5324785A/en
Publication of JPS5324785A publication Critical patent/JPS5324785A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To improve the electric characteristics of FETs and prevent the mechanical damages of electrodes by filling the portions removed of the electrode regions for connection of external leads with an insulator without any spacing.
COPYRIGHT: (C)1978,JPO&Japio
JP9868076A 1976-08-20 1976-08-20 Semiconductor device Pending JPS5324785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9868076A JPS5324785A (en) 1976-08-20 1976-08-20 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9868076A JPS5324785A (en) 1976-08-20 1976-08-20 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5324785A true JPS5324785A (en) 1978-03-07

Family

ID=14226216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9868076A Pending JPS5324785A (en) 1976-08-20 1976-08-20 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5324785A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216325A (en) * 1986-03-18 1987-09-22 Fujitsu Ltd Manufacture of x-ray mask
US5335256A (en) * 1991-03-18 1994-08-02 Canon Kabushiki Kaisha Semiconductor substrate including a single or multi-layer film having different densities in the thickness direction

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216325A (en) * 1986-03-18 1987-09-22 Fujitsu Ltd Manufacture of x-ray mask
JPH0658874B2 (en) * 1986-03-18 1994-08-03 富士通株式会社 X-ray mask manufacturing method
US5335256A (en) * 1991-03-18 1994-08-02 Canon Kabushiki Kaisha Semiconductor substrate including a single or multi-layer film having different densities in the thickness direction

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