JPS532074A - Scribing method for semiconductor wafer - Google Patents

Scribing method for semiconductor wafer

Info

Publication number
JPS532074A
JPS532074A JP7693576A JP7693576A JPS532074A JP S532074 A JPS532074 A JP S532074A JP 7693576 A JP7693576 A JP 7693576A JP 7693576 A JP7693576 A JP 7693576A JP S532074 A JPS532074 A JP S532074A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
scribing method
scribing
wavelength
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7693576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5642138B2 (th
Inventor
Yoshihiko Muraki
Masao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP7693576A priority Critical patent/JPS532074A/ja
Publication of JPS532074A publication Critical patent/JPS532074A/ja
Publication of JPS5642138B2 publication Critical patent/JPS5642138B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP7693576A 1976-06-28 1976-06-28 Scribing method for semiconductor wafer Granted JPS532074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7693576A JPS532074A (en) 1976-06-28 1976-06-28 Scribing method for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7693576A JPS532074A (en) 1976-06-28 1976-06-28 Scribing method for semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS532074A true JPS532074A (en) 1978-01-10
JPS5642138B2 JPS5642138B2 (th) 1981-10-02

Family

ID=13619575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7693576A Granted JPS532074A (en) 1976-06-28 1976-06-28 Scribing method for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS532074A (th)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772090B2 (en) * 2003-09-30 2010-08-10 Intel Corporation Methods for laser scribing wafers

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6152938U (th) * 1984-09-11 1986-04-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772090B2 (en) * 2003-09-30 2010-08-10 Intel Corporation Methods for laser scribing wafers
US8364304B2 (en) 2003-09-30 2013-01-29 Intel Corporation Methods and apparatus for laser scribing wafers

Also Published As

Publication number Publication date
JPS5642138B2 (th) 1981-10-02

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