JPS5317287A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5317287A JPS5317287A JP9133676A JP9133676A JPS5317287A JP S5317287 A JPS5317287 A JP S5317287A JP 9133676 A JP9133676 A JP 9133676A JP 9133676 A JP9133676 A JP 9133676A JP S5317287 A JPS5317287 A JP S5317287A
- Authority
- JP
- Japan
- Prior art keywords
- production
- boehmite
- semiconductor device
- layer
- portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9133676A JPS5317287A (en) | 1976-08-02 | 1976-08-02 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9133676A JPS5317287A (en) | 1976-08-02 | 1976-08-02 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5317287A true JPS5317287A (en) | 1978-02-17 |
Family
ID=14023582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9133676A Pending JPS5317287A (en) | 1976-08-02 | 1976-08-02 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5317287A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4561009A (en) * | 1979-07-11 | 1985-12-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor device |
JPS6278854A (ja) * | 1985-09-30 | 1987-04-11 | Mitsubishi Electric Corp | 配線体の形成方法 |
-
1976
- 1976-08-02 JP JP9133676A patent/JPS5317287A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4561009A (en) * | 1979-07-11 | 1985-12-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor device |
JPS6278854A (ja) * | 1985-09-30 | 1987-04-11 | Mitsubishi Electric Corp | 配線体の形成方法 |
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