JPS52112279A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS52112279A JPS52112279A JP2811476A JP2811476A JPS52112279A JP S52112279 A JPS52112279 A JP S52112279A JP 2811476 A JP2811476 A JP 2811476A JP 2811476 A JP2811476 A JP 2811476A JP S52112279 A JPS52112279 A JP S52112279A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- dependability
- electrode
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To secure formation of high-dependability electrode or wiring layer by removing selectively Si particle left on the substrate against Si - Al film by use of CF4 gas plasma.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2811476A JPS52112279A (en) | 1976-03-17 | 1976-03-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2811476A JPS52112279A (en) | 1976-03-17 | 1976-03-17 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52112279A true JPS52112279A (en) | 1977-09-20 |
Family
ID=12239774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2811476A Pending JPS52112279A (en) | 1976-03-17 | 1976-03-17 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52112279A (en) |
-
1976
- 1976-03-17 JP JP2811476A patent/JPS52112279A/en active Pending
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