JPS52112279A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52112279A
JPS52112279A JP2811476A JP2811476A JPS52112279A JP S52112279 A JPS52112279 A JP S52112279A JP 2811476 A JP2811476 A JP 2811476A JP 2811476 A JP2811476 A JP 2811476A JP S52112279 A JPS52112279 A JP S52112279A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
dependability
electrode
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2811476A
Other languages
Japanese (ja)
Inventor
Kensuke Nakada
Koichiro Mizukami
Osamu Kasahara
Akihiro Tomosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2811476A priority Critical patent/JPS52112279A/en
Publication of JPS52112279A publication Critical patent/JPS52112279A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To secure formation of high-dependability electrode or wiring layer by removing selectively Si particle left on the substrate against Si - Al film by use of CF4 gas plasma.
COPYRIGHT: (C)1977,JPO&Japio
JP2811476A 1976-03-17 1976-03-17 Manufacture of semiconductor device Pending JPS52112279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2811476A JPS52112279A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2811476A JPS52112279A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52112279A true JPS52112279A (en) 1977-09-20

Family

ID=12239774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2811476A Pending JPS52112279A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52112279A (en)

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