JPS5317077A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5317077A
JPS5317077A JP9110076A JP9110076A JPS5317077A JP S5317077 A JPS5317077 A JP S5317077A JP 9110076 A JP9110076 A JP 9110076A JP 9110076 A JP9110076 A JP 9110076A JP S5317077 A JPS5317077 A JP S5317077A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
etching
electrodes
construction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9110076A
Other languages
Japanese (ja)
Inventor
Yasunobu Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9110076A priority Critical patent/JPS5317077A/en
Publication of JPS5317077A publication Critical patent/JPS5317077A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To improve pattern accuracy and prevent blackening of Au at the time of etching the surface protecting film deposited on Au electrodes by using an etching apparatus of the construction wherein the plasma generating part applied with a high frequency electromagnetic field is isolated form a wafer reaction field.
COPYRIGHT: (C)1978,JPO&Japio
JP9110076A 1976-07-30 1976-07-30 Production of semiconductor device Pending JPS5317077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9110076A JPS5317077A (en) 1976-07-30 1976-07-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9110076A JPS5317077A (en) 1976-07-30 1976-07-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5317077A true JPS5317077A (en) 1978-02-16

Family

ID=14017090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9110076A Pending JPS5317077A (en) 1976-07-30 1976-07-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5317077A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61192446U (en) * 1985-05-22 1986-11-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61192446U (en) * 1985-05-22 1986-11-29
JPH051071Y2 (en) * 1985-05-22 1993-01-12

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