JPS5317077A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5317077A JPS5317077A JP9110076A JP9110076A JPS5317077A JP S5317077 A JPS5317077 A JP S5317077A JP 9110076 A JP9110076 A JP 9110076A JP 9110076 A JP9110076 A JP 9110076A JP S5317077 A JPS5317077 A JP S5317077A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- etching
- electrodes
- construction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To improve pattern accuracy and prevent blackening of Au at the time of etching the surface protecting film deposited on Au electrodes by using an etching apparatus of the construction wherein the plasma generating part applied with a high frequency electromagnetic field is isolated form a wafer reaction field.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9110076A JPS5317077A (en) | 1976-07-30 | 1976-07-30 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9110076A JPS5317077A (en) | 1976-07-30 | 1976-07-30 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5317077A true JPS5317077A (en) | 1978-02-16 |
Family
ID=14017090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9110076A Pending JPS5317077A (en) | 1976-07-30 | 1976-07-30 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5317077A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61192446U (en) * | 1985-05-22 | 1986-11-29 |
-
1976
- 1976-07-30 JP JP9110076A patent/JPS5317077A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61192446U (en) * | 1985-05-22 | 1986-11-29 | ||
JPH051071Y2 (en) * | 1985-05-22 | 1993-01-12 |
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