JPS53135581A - Manufacture for mos semiconductor device - Google Patents

Manufacture for mos semiconductor device

Info

Publication number
JPS53135581A
JPS53135581A JP4993877A JP4993877A JPS53135581A JP S53135581 A JPS53135581 A JP S53135581A JP 4993877 A JP4993877 A JP 4993877A JP 4993877 A JP4993877 A JP 4993877A JP S53135581 A JPS53135581 A JP S53135581A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
mos semiconductor
gate layer
sideetching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4993877A
Other languages
English (en)
Inventor
Shigeru Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4993877A priority Critical patent/JPS53135581A/ja
Publication of JPS53135581A publication Critical patent/JPS53135581A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
JP4993877A 1977-05-02 1977-05-02 Manufacture for mos semiconductor device Pending JPS53135581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4993877A JPS53135581A (en) 1977-05-02 1977-05-02 Manufacture for mos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4993877A JPS53135581A (en) 1977-05-02 1977-05-02 Manufacture for mos semiconductor device

Publications (1)

Publication Number Publication Date
JPS53135581A true JPS53135581A (en) 1978-11-27

Family

ID=12844961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4993877A Pending JPS53135581A (en) 1977-05-02 1977-05-02 Manufacture for mos semiconductor device

Country Status (1)

Country Link
JP (1) JPS53135581A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583270A (en) * 1978-12-15 1980-06-23 Raytheon Co Method of fabricating semiconductor device
JPS5671971A (en) * 1979-11-16 1981-06-15 Fujitsu Ltd Mos integrated circuit system and preparation method thereof
US10276679B2 (en) * 2017-05-30 2019-04-30 Vanguard International Semiconductor Corporation Semiconductor device and method for manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583270A (en) * 1978-12-15 1980-06-23 Raytheon Co Method of fabricating semiconductor device
JPS6326553B2 (ja) * 1978-12-15 1988-05-30 Raytheon Co
JPS5671971A (en) * 1979-11-16 1981-06-15 Fujitsu Ltd Mos integrated circuit system and preparation method thereof
US10276679B2 (en) * 2017-05-30 2019-04-30 Vanguard International Semiconductor Corporation Semiconductor device and method for manufacturing the same

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