JPS53133368A - Boat for liquid phase epitaxial growth - Google Patents
Boat for liquid phase epitaxial growthInfo
- Publication number
- JPS53133368A JPS53133368A JP4914977A JP4914977A JPS53133368A JP S53133368 A JPS53133368 A JP S53133368A JP 4914977 A JP4914977 A JP 4914977A JP 4914977 A JP4914977 A JP 4914977A JP S53133368 A JPS53133368 A JP S53133368A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- boat
- liquid phase
- phase epitaxial
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To avoid the remianing of the solution onto the substrate after contact with the solution and thus to ensure a flat epitaxial growth layer by distributing the substrate to be grown in the vertical direction onto the substrate support boad which is made relatively to the solutions upport board containing a solution tank part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4914977A JPS53133368A (en) | 1977-04-27 | 1977-04-27 | Boat for liquid phase epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4914977A JPS53133368A (en) | 1977-04-27 | 1977-04-27 | Boat for liquid phase epitaxial growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53133368A true JPS53133368A (en) | 1978-11-21 |
Family
ID=12823028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4914977A Pending JPS53133368A (en) | 1977-04-27 | 1977-04-27 | Boat for liquid phase epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53133368A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3759759A (en) * | 1970-01-29 | 1973-09-18 | Fairchild Camera Instr Co | Push pull method for solution epitaxial growth of iii v compounds |
JPS5067559A (en) * | 1973-10-15 | 1975-06-06 |
-
1977
- 1977-04-27 JP JP4914977A patent/JPS53133368A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3759759A (en) * | 1970-01-29 | 1973-09-18 | Fairchild Camera Instr Co | Push pull method for solution epitaxial growth of iii v compounds |
JPS5067559A (en) * | 1973-10-15 | 1975-06-06 |
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