JPS53133368A - Boat for liquid phase epitaxial growth - Google Patents

Boat for liquid phase epitaxial growth

Info

Publication number
JPS53133368A
JPS53133368A JP4914977A JP4914977A JPS53133368A JP S53133368 A JPS53133368 A JP S53133368A JP 4914977 A JP4914977 A JP 4914977A JP 4914977 A JP4914977 A JP 4914977A JP S53133368 A JPS53133368 A JP S53133368A
Authority
JP
Japan
Prior art keywords
epitaxial growth
boat
liquid phase
phase epitaxial
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4914977A
Other languages
Japanese (ja)
Inventor
Mikihiko Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP4914977A priority Critical patent/JPS53133368A/en
Publication of JPS53133368A publication Critical patent/JPS53133368A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To avoid the remianing of the solution onto the substrate after contact with the solution and thus to ensure a flat epitaxial growth layer by distributing the substrate to be grown in the vertical direction onto the substrate support boad which is made relatively to the solutions upport board containing a solution tank part.
COPYRIGHT: (C)1978,JPO&Japio
JP4914977A 1977-04-27 1977-04-27 Boat for liquid phase epitaxial growth Pending JPS53133368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4914977A JPS53133368A (en) 1977-04-27 1977-04-27 Boat for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4914977A JPS53133368A (en) 1977-04-27 1977-04-27 Boat for liquid phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS53133368A true JPS53133368A (en) 1978-11-21

Family

ID=12823028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4914977A Pending JPS53133368A (en) 1977-04-27 1977-04-27 Boat for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS53133368A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3759759A (en) * 1970-01-29 1973-09-18 Fairchild Camera Instr Co Push pull method for solution epitaxial growth of iii v compounds
JPS5067559A (en) * 1973-10-15 1975-06-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3759759A (en) * 1970-01-29 1973-09-18 Fairchild Camera Instr Co Push pull method for solution epitaxial growth of iii v compounds
JPS5067559A (en) * 1973-10-15 1975-06-06

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