JPS5388569A - Liquid phase epitaxial growth apparatus - Google Patents
Liquid phase epitaxial growth apparatusInfo
- Publication number
- JPS5388569A JPS5388569A JP313077A JP313077A JPS5388569A JP S5388569 A JPS5388569 A JP S5388569A JP 313077 A JP313077 A JP 313077A JP 313077 A JP313077 A JP 313077A JP S5388569 A JPS5388569 A JP S5388569A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- growth apparatus
- phase epitaxial
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To facilitate controlling of doping level through averting of the change in melt composition ratio owing to evaporation of an additive and impurity and prevent the oxidation of melt surface by charging the additive and impurity into the melt before contacting a semiconductor crystal substrate to the melt.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP313077A JPS5388569A (en) | 1977-01-14 | 1977-01-14 | Liquid phase epitaxial growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP313077A JPS5388569A (en) | 1977-01-14 | 1977-01-14 | Liquid phase epitaxial growth apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5388569A true JPS5388569A (en) | 1978-08-04 |
Family
ID=11548765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP313077A Pending JPS5388569A (en) | 1977-01-14 | 1977-01-14 | Liquid phase epitaxial growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5388569A (en) |
-
1977
- 1977-01-14 JP JP313077A patent/JPS5388569A/en active Pending
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