JPS5388569A - Liquid phase epitaxial growth apparatus - Google Patents

Liquid phase epitaxial growth apparatus

Info

Publication number
JPS5388569A
JPS5388569A JP313077A JP313077A JPS5388569A JP S5388569 A JPS5388569 A JP S5388569A JP 313077 A JP313077 A JP 313077A JP 313077 A JP313077 A JP 313077A JP S5388569 A JPS5388569 A JP S5388569A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
growth apparatus
phase epitaxial
melt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP313077A
Other languages
Japanese (ja)
Inventor
Ryoichi Hirano
Jun Ishii
Toshio Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP313077A priority Critical patent/JPS5388569A/en
Publication of JPS5388569A publication Critical patent/JPS5388569A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate controlling of doping level through averting of the change in melt composition ratio owing to evaporation of an additive and impurity and prevent the oxidation of melt surface by charging the additive and impurity into the melt before contacting a semiconductor crystal substrate to the melt.
COPYRIGHT: (C)1978,JPO&Japio
JP313077A 1977-01-14 1977-01-14 Liquid phase epitaxial growth apparatus Pending JPS5388569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP313077A JPS5388569A (en) 1977-01-14 1977-01-14 Liquid phase epitaxial growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP313077A JPS5388569A (en) 1977-01-14 1977-01-14 Liquid phase epitaxial growth apparatus

Publications (1)

Publication Number Publication Date
JPS5388569A true JPS5388569A (en) 1978-08-04

Family

ID=11548765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP313077A Pending JPS5388569A (en) 1977-01-14 1977-01-14 Liquid phase epitaxial growth apparatus

Country Status (1)

Country Link
JP (1) JPS5388569A (en)

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