JPS54105465A - Liquid-phase epitaxial growth unit - Google Patents

Liquid-phase epitaxial growth unit

Info

Publication number
JPS54105465A
JPS54105465A JP1200478A JP1200478A JPS54105465A JP S54105465 A JPS54105465 A JP S54105465A JP 1200478 A JP1200478 A JP 1200478A JP 1200478 A JP1200478 A JP 1200478A JP S54105465 A JPS54105465 A JP S54105465A
Authority
JP
Japan
Prior art keywords
holder
main body
epitaxial growth
boat
boat main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1200478A
Other languages
Japanese (ja)
Inventor
Makoto Naito
Tetsuo Sekiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1200478A priority Critical patent/JPS54105465A/en
Publication of JPS54105465A publication Critical patent/JPS54105465A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a flat liquid-phase opitaxial layer, by varying the holding angle of a substrate holder, equipped into a boat main body, from the outside.
CONSTITUTION: A GaP substrate is mounted on holder 12 and contained in the boat main body. sliding board 3 is slid at a fixed temperature to flow a solution into the boat main body. By cooling the boat main body, a crystal is grown on the GaP substrate. Sliding board 5 is slid to drop the solution into tank 6 and at the same time, the holder is made to stand upright by rod 13. Stopper 20 is provided to the bottom part of boat 11 at the tip of the holder, the holder stands upright in parallel, and no solution remains on the GaP substrate; and the thickness of the epitaxial growth layer is uniform and its surface is flat.
COPYRIGHT: (C)1979,JPO&Japio
JP1200478A 1978-02-07 1978-02-07 Liquid-phase epitaxial growth unit Pending JPS54105465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200478A JPS54105465A (en) 1978-02-07 1978-02-07 Liquid-phase epitaxial growth unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200478A JPS54105465A (en) 1978-02-07 1978-02-07 Liquid-phase epitaxial growth unit

Publications (1)

Publication Number Publication Date
JPS54105465A true JPS54105465A (en) 1979-08-18

Family

ID=11793430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1200478A Pending JPS54105465A (en) 1978-02-07 1978-02-07 Liquid-phase epitaxial growth unit

Country Status (1)

Country Link
JP (1) JPS54105465A (en)

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