JPS54105465A - Liquid-phase epitaxial growth unit - Google Patents
Liquid-phase epitaxial growth unitInfo
- Publication number
- JPS54105465A JPS54105465A JP1200478A JP1200478A JPS54105465A JP S54105465 A JPS54105465 A JP S54105465A JP 1200478 A JP1200478 A JP 1200478A JP 1200478 A JP1200478 A JP 1200478A JP S54105465 A JPS54105465 A JP S54105465A
- Authority
- JP
- Japan
- Prior art keywords
- holder
- main body
- epitaxial growth
- boat
- boat main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a flat liquid-phase opitaxial layer, by varying the holding angle of a substrate holder, equipped into a boat main body, from the outside.
CONSTITUTION: A GaP substrate is mounted on holder 12 and contained in the boat main body. sliding board 3 is slid at a fixed temperature to flow a solution into the boat main body. By cooling the boat main body, a crystal is grown on the GaP substrate. Sliding board 5 is slid to drop the solution into tank 6 and at the same time, the holder is made to stand upright by rod 13. Stopper 20 is provided to the bottom part of boat 11 at the tip of the holder, the holder stands upright in parallel, and no solution remains on the GaP substrate; and the thickness of the epitaxial growth layer is uniform and its surface is flat.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1200478A JPS54105465A (en) | 1978-02-07 | 1978-02-07 | Liquid-phase epitaxial growth unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1200478A JPS54105465A (en) | 1978-02-07 | 1978-02-07 | Liquid-phase epitaxial growth unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54105465A true JPS54105465A (en) | 1979-08-18 |
Family
ID=11793430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1200478A Pending JPS54105465A (en) | 1978-02-07 | 1978-02-07 | Liquid-phase epitaxial growth unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54105465A (en) |
-
1978
- 1978-02-07 JP JP1200478A patent/JPS54105465A/en active Pending
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